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3 produkter
3 produkter
E-bok
PDF, Engelska, 20072 656 kr
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An authoritative, systematic, and comprehensive description of current CMP technology Chemical Mechanical Planarization (CMP) provides the greatest degree of planarization of any known technique. The current standard for integrated circuit (IC) planarization, CMP is playing an increasingly important role in other related applications such as microelectromechanical systems (MEMS) and computer hard drive manufacturing. This reference focuses on the chemical aspects of the technology and includes contributions from the foremost experts on specific applications. After a detailed overview of the fundamentals and basic science of CMP, Microelectronic Applications of Chemical Mechanical Planarization: * Provides in-depth coverage of a wide range of state-of-the-art technologies and applications * Presents information on new designs, capabilities, and emerging technologies, including topics like CMP with nanomaterials and 3D chips * Discusses different types of CMP tools, pads for IC CMP, modeling, and the applicability of tribometrology to various aspects of CMP * Covers nanotopography, CMP performance and defect profiles, CMP waste treatment, and the chemistry and colloidal properties of the slurries used in CMP * Provides a perspective on the opportunities and challenges of the next fifteen years Complete with case studies, this is a valuable, hands-on resource for professionals, including process engineers, equipment engineers, formulation chemists, IC manufacturers, and others. With systematic organization and questions at the end of each chapter to facilitate learning, it is an ideal introduction to CMP and an excellent text for students in advanced graduate courses that cover CMP or related semiconductor manufacturing processes.
Inbunden, Engelska, 2007
2 365 kr
Skickas inom 5-8 vardagar
An authoritative, systematic, and comprehensive description of current CMP technology Chemical Mechanical Planarization (CMP) provides the greatest degree of planarization of any known technique. The current standard for integrated circuit (IC) planarization, CMP is playing an increasingly important role in other related applications such as microelectromechanical systems (MEMS) and computer hard drive manufacturing. This reference focuses on the chemical aspects of the technology and includes contributions from the foremost experts on specific applications. After a detailed overview of the fundamentals and basic science of CMP, Microelectronic Applications of Chemical Mechanical Planarization:* Provides in-depth coverage of a wide range of state-of-the-art technologies and applications* Presents information on new designs, capabilities, and emerging technologies, including topics like CMP with nanomaterials and 3D chips* Discusses different types of CMP tools, pads for IC CMP, modeling, and the applicability of tribometrology to various aspects of CMP* Covers nanotopography, CMP performance and defect profiles, CMP waste treatment, and the chemistry and colloidal properties of the slurries used in CMP* Provides a perspective on the opportunities and challenges of the next fifteen years Complete with case studies, this is a valuable, hands-on resource for professionals, including process engineers, equipment engineers, formulation chemists, IC manufacturers, and others. With systematic organization and questions at the end of each chapter to facilitate learning, it is an ideal introduction to CMP and an excellent text for students in advanced graduate courses that cover CMP or related semiconductor manufacturing processes.
Inbunden, Engelska, 2026
1 610 kr
Kommande
Understand the theory behind an area of rapid engineering innovation The field of power electronics has been rapidly transformed in recent decades by astonishing advances in power converter network techniques. Innovation in this field, however, has quickly come to outpace standards of mathematical knowledge among engineers, leading to ad hoc research outputs which are sometimes difficult to understand and duplicate. There is an urgent need for research which emphasizes the mathematical foundations of power converter topologies and operations, to equip engineers with the tools they need to continue driving extraordinary technological change. Graph Theory in Power Converters meets this need with a comprehensive overview of the topological relationships and systematic operations within power converters. Divided into two parts, the first emphasizing mathematical theory and research background and the second emphasizing practical applications, this book promises to fully equip readers with graph theory as a tool for analyzing, modelling and designing power converters. Graph Theory in Power Converters also provides readers: Coverage of both mainstream categories of power converters and emerging types, such as multiport converters and new current-source convertersDetailed discussion of topics including matrix-based theory, dual and isomorphic theories, topology transformations, and moreAnalysis and implementations driven by the authorial team's own researchGraph Theory in Power Converters is ideal for engineers and researchers working in power electronics, as well as graduate students in power electronics and related fields.