From the Foreword: The two most valuable features of this major reference work are the breadth of material and the depth of the topics covered. Each volume comprehensively treats a significant and specific subject area of fundamental importance to MEME/NEMS... Collectively, this material provides tremendous resources for emerging design, fabrication/manufacturing techniques and applications of MEMS/NEMS and MOEMS... Therefore, the energing techniques, applications, and examples of MEMS/NEMS collected by Professor Leondes in this work provide a wealth of practical ideas and methodologies designed to trigger the development of innovation. The contributors in this major reference work clearly reveal the effectiveness and great significance of the techniques available and with further development the essential role that they will play in the future. Xuan F Zha National Institute of Standards and Technology Gaithersburg, Maryland, USA July 30, 2005

• Manufacturing Advisory Service System for Concurrent and Collaborative Design of MEMS Devices.- Web-Enabled Knowledge-Intensive Support Framework for Collaborative Design of MEMS.- Web-Enabled Database System Development for Design and Manufacturing of Micro-Electro-Mechanical Systems (MEMS).- Techniques in Proper Orthogonal Decomposition and Component Mode Synthesis for the Dynamic Simulation of Complex MEMS Devices and Their Applications.- Techniques in Global Optimal Design for MEMS & Their Applications.- Theory and Design of Micromechanical Vibratory Gyroscopes.- A Hierarchical Design Platform for Microelectrofluidic Systems (MEFS).- Techniques in Electrostatics Analysis of MEMS and Their Applications.- Techniques for Efficient Analytical and Simulation Methods in the Prototyping of MEMS Systems.- Techniques in the Fabrication of High-Speed Micro-Rotors for MEMS Applications.- Fabrication Techniques in Micromachined Capacitive Ultrasonic Transducers and their Applications.- GaAs Thermally Based MEMS Devices—Fabrication Techniques, Characterization and Modeling.- Novel MEMS Fluidic Integrated Circuit Technology with ‘MOSFET-Like Microvalve Elements’.- Hydrogel-based ?TAS.- Crosslinked PMMA as a Low-Dimensional Dielectric Sacrificial Layer for MEMS/NEMS and Quantum Nanostructures Fabrication.- MEMS/NEMS Techniques and Applications.- Techniques in the Development of Micromachine Tool Prototypes & Their Applications in Microfactories MET Technology.- Tool-based Micro Machining and Applications in MEMS.- Micro-machined Passive Valves: Fabrication Techniques, Characterisation and their Application.- Rapid Prototyping and Rapid Tooling Techniques for the Manufacturing of Silicon, Polymer, Metal and Ceramic Microdevices.- Injection Molding Techniques for theFabrication of MEMS Elements.- Excimer Laser Micromachined Three-dimensional Microstructures—Techniques and Applications.- Techniques in Scanning Acoustic Microscopy for Enhanced Failure and Material Analysis of Microsystems.- Production Scheduling in MEMS Manufacturing.- MEMS-based Accelerometers and their Application to Vibration Suppression in Hard Disk Drives.- Micromachined Thermal Accelerometer without Proof Mass.- Techniques in MEMS Devices for Micro Humidity Sensors and Their Applications.- Modeling the Electromechanical Response of Electrostatic Actuators.- Micropumps for MEMS/NEMS and Microfluidic Systems.- FEM (Finite Element Modeling) Techniques for Electrostatic Microactuators.- Techniques in the Design of Thermomechanical Microactuators.- Techniques in MEMS Microthermal Actuators and Their Applications.- Techniques in Residual Stress Measurement for MEMS and Their Applications.- Techniques in Sonophoresis Biomedical Devices and Their Applications.- MEMS Application of Actuators and Sensors for Glaucoma Treatment.- Single-Crystal Silicon Based Electrothermal MEMS Mirrors for Biomedical Imaging Applications.- Techniques in the Development of Endovascular Microtools & Their Applications.- Techniques in the Design and Fabrication of Optical MEMS Switches and their Application in Optical Communication Systems.- Micromachining Techniques and MEMS Structures in Optical Interferometric Sensors.- Magnetic Microactuators—Techniques and Applications.- Techniques in the Design of Micro-Machined Electrostatic Torsion Micro-Mirrors and Their Applications.- Vertical Combdrive Actuator: Design and Fabrication for Micromirror Applications.- Three-Dimensional Techniques for FEM Simulations in Laser Modules and Their Applications.

From the Foreword: The two most valuable features of this major reference work are the breadth of material and the depth of the topics covered. Each volume comprehensively treats a significant and specific subject area of fundamental importance to MEME/NEMS... Collectively, this material provides tremendous resources for emerging design, fabrication/manufacturing techniques and applications of MEMS/NEMS and MOEMS... Therefore, the energing techniques, applications, and examples of MEMS/NEMS collected by Professor Leondes in this work provide a wealth of practical ideas and methodologies designed to trigger the development of innovation. The contributors in this major reference work clearly reveal the effectiveness and great significance of the techniques available and with further development the essential role that they will play in the future. Xuan F Zha National Institute of Standards and Technology Gaithersburg, Maryland, USA July 30, 2005

• Manufacturing Advisory Service System for Concurrent and Collaborative Design of MEMS Devices.- Web-Enabled Knowledge-Intensive Support Framework for Collaborative Design of MEMS.- Web-Enabled Database System Development for Design and Manufacturing of Micro-Electro-Mechanical Systems (MEMS).- Techniques in Proper Orthogonal Decomposition and Component Mode Synthesis for the Dynamic Simulation of Complex MEMS Devices and Their Applications.- Techniques in Global Optimal Design for MEMS & Their Applications.- Theory and Design of Micromechanical Vibratory Gyroscopes.- A Hierarchical Design Platform for Microelectrofluidic Systems (MEFS).- Techniques in Electrostatics Analysis of MEMS and Their Applications.- Techniques for Efficient Analytical and Simulation Methods in the Prototyping of MEMS Systems.- Techniques in the Fabrication of High-Speed Micro-Rotors for MEMS Applications.- Fabrication Techniques in Micromachined Capacitive Ultrasonic Transducers and their Applications.- GaAs Thermally Based MEMS Devices—Fabrication Techniques, Characterization and Modeling.- Novel MEMS Fluidic Integrated Circuit Technology with ‘MOSFET-Like Microvalve Elements’.- Hydrogel-based ?TAS.- Crosslinked PMMA as a Low-Dimensional Dielectric Sacrificial Layer for MEMS/NEMS and Quantum Nanostructures Fabrication.- MEMS/NEMS Techniques and Applications.- Techniques in the Development of Micromachine Tool Prototypes & Their Applications in Microfactories MET Technology.- Tool-based Micro Machining and Applications in MEMS.- Micro-machined Passive Valves: Fabrication Techniques, Characterisation and their Application.- Rapid Prototyping and Rapid Tooling Techniques for the Manufacturing of Silicon, Polymer, Metal and Ceramic Microdevices.- Injection Molding Techniques for theFabrication of MEMS Elements.- Excimer Laser Micromachined Three-dimensional Microstructures—Techniques and Applications.- Techniques in Scanning Acoustic Microscopy for Enhanced Failure and Material Analysis of Microsystems.- Production Scheduling in MEMS Manufacturing.- MEMS-based Accelerometers and their Application to Vibration Suppression in Hard Disk Drives.- Micromachined Thermal Accelerometer without Proof Mass.- Techniques in MEMS Devices for Micro Humidity Sensors and Their Applications.- Modeling the Electromechanical Response of Electrostatic Actuators.- Micropumps for MEMS/NEMS and Microfluidic Systems.- FEM (Finite Element Modeling) Techniques for Electrostatic Microactuators.- Techniques in the Design of Thermomechanical Microactuators.- Techniques in MEMS Microthermal Actuators and Their Applications.- Techniques in Residual Stress Measurement for MEMS and Their Applications.- Techniques in Sonophoresis Biomedical Devices and Their Applications.- MEMS Application of Actuators and Sensors for Glaucoma Treatment.- Single-Crystal Silicon Based Electrothermal MEMS Mirrors for Biomedical Imaging Applications.- Techniques in the Development of Endovascular Microtools & Their Applications.- Techniques in the Design and Fabrication of Optical MEMS Switches and their Application in Optical Communication Systems.- Micromachining Techniques and MEMS Structures in Optical Interferometric Sensors.- Magnetic Microactuators—Techniques and Applications.- Techniques in the Design of Micro-Machined Electrostatic Torsion Micro-Mirrors and Their Applications.- Vertical Combdrive Actuator: Design and Fabrication for Micromirror Applications.- Three-Dimensional Techniques for FEM Simulations in Laser Modules and Their Applications.