3D IC Stacking Technology

Inbunden, Engelska, 2011

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Beskrivning

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The latest advances in three-dimensional integrated circuit stacking technology

With a focus on industrial applications, 3D IC Stacking Technology offers comprehensive coverage of design, test, and fabrication processing methods for three-dimensional device integration. Each chapter in this authoritative guide is written by industry experts and details a separate fabrication step. Future industry applications and cutting-edge design potential are also discussed. This is an essential resource for semiconductor engineers and portable device designers.

3D IC Stacking Technology covers:

High density through silicon stacking (TSS) technology
Practical design ecosystem for heterogeneous 3D IC products
Design automation and TCAD tool solutions for through silicon via (TSV)-based 3D IC stack
Process integration for TSV manufacturing
High-aspect-ratio silicon etch for TSV
Dielectric deposition for TSV
Barrier and seed deposition
Copper electrodeposition for TSV
Chemical mechanical polishing for TSV applications
Temporary and permanent bonding
Assembly and test aspects of TSV technology

Produktinformation

Utgivningsdatum:2011-09-16
Mått:160 x 236 x 23 mm
Vikt:782 g
Format:Inbunden
Språk:Engelska
Antal sidor:544
Förlag:McGraw-Hill Education
ISBN:9780071741958

Utforska kategorier

Elektronik och kommunikationer inom Naturvetenskap och teknik

Mer om författaren

Banqiu Wu is Chief Technology Officer, TSV and Mask Products Business Group, Applied Materials, Inc. Dr. Wu has published over 50 technological papers in 10 peer-reviewed journals and conference proceedings, and authored/co-authored several books, including Photomask Fabrication Technology and Extreme Ultraviolet Lithography. He holds multiple patents and awards. Dr. Ajay Kumar is Vice President and General Manager of TSV and Mask Products Business Group, Applied Materials, Inc. He has more than 75 publications to his credit in various journals including several review articles. Dr. Kumar co-authored the book Extreme Ultraviolet Lithography. He holds more than 100 US patents and has won many awards for innovation and commercialization. Sesh Ramaswami is a senior director of TSV strategy and marketing at Applied Materials, Inc. His responsibilities include TSV and associated wafer level processing for packaging. Ramaswami holds 35 US patents and has 40+ conference publications and presentations in conferences such as MRS, ECS, VMIC, AVS, SPIE and IRPS.

Innehållsförteckning

Chapter 1. Introduction to High-Density Through Silicon Stacking TechnologyChapter 2. A Practical Design Eco-System for Heterogeneous 3D IC ProductsChapter 3. Design Automation and TCAD Tool Solutions for Through Silicon Via-Based 3D IC StackChapter 4. Process Integration for TSV ManufacturingChapter 5. High-Aspect-Ratio Silicon Etch for TSVChapter 6. Dielectric Deposition for Through Silicon ViasChapter 7. Barrier and Seed DepositionChapter 8. Copper Electrodeposition for TSVChapter 9. Chemical Mechanical Polishing for TSVChapter 10. Temporary and Permanent BondingChapter 11. Assembly and Test Aspects of TSV TechnologyIndex