Fabrication Engineering at the Micro- and Nanoscale

In the education area, Professor Campbell leads the University of Minnesota''s participation in Nano-Link, an NSF sponsored regional center for nanotechnology education at the AAS level. He has designed and implemented a one-semester capstone experience Microelectronic Fabrication and created the text book as a result.

Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, this fourth edition of Fabrication Engineering at the Micro- and Nanoscale provides a thorough and accessible introduction to all fields of micro and nano fabrication. The text covers the entire basic unit processes used to fabricate integrated circuits and other devices.