Sunipa Roy is assistant professor of electronics and telecommunications engineering at Guru Nanak Institute of Technology, Calcutta, India. She received her M.Tech in VLSI and microelectronics from West Bengal University of Technology in 2009, and her Ph.D in engineering from Jadavpur University in 2014. She has served as a fellow of the Council of Scientific and Industrial Research (India), is a member of the Institution of Engineers (India), and a member of the IEEE. She has also presented numerous papers in journals and conferences. Her research interests include MEMS, nanotechnology, and graphene and its application as a gas sensor.Chandan Kumar Sarkar is professor of electronics and telecommunications engineering at Jadavpur University, Calcutta, India. He received his B.Sc (Hons) and M.Sc in physics from Aligarh Muslim University, India in 1975, earned his Ph.D from Calcutta University in 1979, and his D.Phil from the University of Oxford, UK in 1984. In 1980, Dr. Sarkar received the British Royal Commission Fellowship to work at the University of Oxford. He worked as a visiting scientist at the Max Planck Laboratory in Stuttgart, Germany, and at Linkoping University in Sweden. He also taught in the Department of Physics at the University of Oxford.

"…this book is an outstanding, broad overview of basics, concepts, specific materials used for each sensing application, and techniques employed in current, emerging, and possible future MEMS applications. I strongly recommend this book to all research students interested in MEMS and gas sensors." —MRS Bulletin, December 2016

• Section I: Fabrication Procedure. Introduction. Substrate for MEMS. Deposition. Photolithography: Pattern Transfer. Structuring MEMS: Micromachining. Microheaters for Gas Sensor. Section II: Sensor Applications. Sensing with Graphene. Nanocrystalline ZnO-Based Microfabricated Chemical Sensor. Nanostructures for Volatile Organic Compound Detection. Sensor Interfaces. MEMS- and Nanotechnology-Enabled Sensor Applications.

Sunipa Roy is assistant professor of electronics and telecommunications engineering at Guru Nanak Institute of Technology, Calcutta, India. She received her M.Tech in VLSI and microelectronics from West Bengal University of Technology in 2009, and her Ph.D in engineering from Jadavpur University in 2014. She has served as a fellow of the Council of Scientific and Industrial Research (India), is a member of the Institution of Engineers (India), and a member of the IEEE. She has also presented numerous papers in journals and conferences. Her research interests include MEMS, nanotechnology, and graphene and its application as a gas sensor.Chandan Kumar Sarkar is professor of electronics and telecommunications engineering at Jadavpur University, Calcutta, India. He received his B.Sc (Hons) and M.Sc in physics from Aligarh Muslim University, India in 1975, earned his Ph.D from Calcutta University in 1979, and his D.Phil from the University of Oxford, UK in 1984. In 1980, Dr. Sarkar received the British Royal Commission Fellowship to work at the University of Oxford. He worked as a visiting scientist at the Max Planck Laboratory in Stuttgart, Germany, and at Linkoping University in Sweden. He also taught in the Department of Physics at the University of Oxford.

"…this book is an outstanding, broad overview of basics, concepts, specific materials used for each sensing application, and techniques employed in current, emerging, and possible future MEMS applications. I strongly recommend this book to all research students interested in MEMS and gas sensors." —MRS Bulletin, December 2016

• Section I: Fabrication Procedure. Introduction. Substrate for MEMS. Deposition. Photolithography: Pattern Transfer. Structuring MEMS: Micromachining. Microheaters for Gas Sensor. Section II: Sensor Applications. Sensing with Graphene. Nanocrystalline ZnO-Based Microfabricated Chemical Sensor. Nanostructures for Volatile Organic Compound Detection. Sensor Interfaces. MEMS- and Nanotechnology-Enabled Sensor Applications.

Sunipa Roy is assistant professor of electronics and telecommunications engineering at Guru Nanak Institute of Technology, Calcutta, India. She received her M.Tech in VLSI and microelectronics from West Bengal University of Technology in 2009, and her Ph.D in engineering from Jadavpur University in 2014. She has served as a fellow of the Council of Scientific and Industrial Research (India), is a member of the Institution of Engineers (India), and a member of the IEEE. She has also presented numerous papers in journals and conferences. Her research interests include MEMS, nanotechnology, and graphene and its application as a gas sensor.Chandan Kumar Sarkar is professor of electronics and telecommunications engineering at Jadavpur University, Calcutta, India. He received his B.Sc (Hons) and M.Sc in physics from Aligarh Muslim University, India in 1975, earned his Ph.D from Calcutta University in 1979, and his D.Phil from the University of Oxford, UK in 1984. In 1980, Dr. Sarkar received the British Royal Commission Fellowship to work at the University of Oxford. He worked as a visiting scientist at the Max Planck Laboratory in Stuttgart, Germany, and at Linkoping University in Sweden. He also taught in the Department of Physics at the University of Oxford.

"…this book is an outstanding, broad overview of basics, concepts, specific materials used for each sensing application, and techniques employed in current, emerging, and possible future MEMS applications. I strongly recommend this book to all research students interested in MEMS and gas sensors." —MRS Bulletin, December 2016

• Section I: Fabrication Procedure. Introduction. Substrate for MEMS. Deposition. Photolithography: Pattern Transfer. Structuring MEMS: Micromachining. Microheaters for Gas Sensor. Section II: Sensor Applications. Sensing with Graphene. Nanocrystalline ZnO-Based Microfabricated Chemical Sensor. Nanostructures for Volatile Organic Compound Detection. Sensor Interfaces. MEMS- and Nanotechnology-Enabled Sensor Applications.