Introduction to Surface Engineering and Functionally Engineered Materials

Peter Martin worked at Battelle, Pacific Northwest Laboratory (BNW) for over 29 years where he currently holds an Emeritus Laboratory Fellow appointment, and specializes in developing thin film coatings for energy, biomedical, space and defense applications. He pioneered the use of reactive magnetron sputtering technology to fabricate novel and advanced optical coating materials and specializes in large area optical and thin film coating development. He has also led development of high performance large area ground-based and space-based laser mirrors for DOD applications.Dr. Martin has written over 400 technical publications. He has won three R&D 100 Awards for his work in microfabrication and barrier coatings for flat panel displays, has two FLC awards, was awarded Battelle Technology of the Year (2003) for his work with the photolytic artificial lung, and voted Distinguished Inventor and PNNL 2005 Inventor of the Year. He has 26 US patents and numerous foreign and pending patents. He also teaches short courses on smart materials and energy materials and applications.

"This book will be an important addition to overcoming this problem. Well done Peter Martin!." (Society of Vacuum Coaters Bulletin, 2012)

• 1 Properties of Solid Surfaces 1 1.1 Introduction 11.2 Tribological Properties of Solid Surfaces 71.3 Optical Properties of Solid Surfaces 251.4 Electrical and Opto-electronic Properties of Solid Surfaces 291.5 Corrosion of Solid Surfaces342 Thin Film Deposition Processes 392.1 Physical Vapor Deposition 402.2 Chemical Vapor Deposition 902.3 Pulsed Laser Deposition 1142.4 Hybrid Deposition Processes 1203 Thin Film Structures and Defects 1433.1 Thin Film Nucleation and Growth 1443.2 Structure of Thin Films 1553.3 Thin Film Structure Zone Models 1724. Thin Film Tribological Materials 1874.1 Wear Resistant Thin Film Materials 1884.2 Ultrifunctional Nanostructured, Nanolaminate and Nanocomposite Triboligical Materials 2565. Optical Thin Films and Composites 2835.1 Optical Properties at an Interface 2855.2 Single Layer Optical Coatings 2925.3 Multilayer Thin Film Optical Coatings 2965.4 Color and Chromaticity in Thin Films 3075.5 Decorative and Architectural Coatings 3306 Fabrication Processes for Electrical and Electro-Optical Thin Films 3376.1 Plasma Processing: Introduction 3386.2 Etching Processes 3476.3 Wet Chemical Etching 3596.4 Metallization 3606.5 Photolithography 3686.6 Deposition Process for Piezoelectric and Ferroelectric Thin Films 3726.7 Deposition Processes for Semiconductor Thin Films 3767 Functionally Engineered Materials 3877.1 Energy Band Structure of Solids 3887.2 Low Dimensional Structures 3927.3 Energy Band Engineering 4007.4 Artificially Structured and Sculpted Micro and NanoStructures 4318.0 Multifunctional Surface Engineering Applications 4578.1 Thin Film Photovoltaics 4578.2 Transparent Conductive Oxide Thin Films 4628.3 Electrochromic and Thermochromic Coatings 4808.4 Thin Film Permeation barriers 4858.5 Photocatalytic Thin Films and Low Dimensional Structures 4938.6 Frequency selective surfaces 4989 Looking into the Future: Bio-Inspired Materials and Surfaces 5099.1 Functional Biomaterials 5099.2 Functional Biomaterials: Self Cleaning Biological Materials 5159.3 Functional Biomaterials: Self Healing Biological Materials 5229.4 Self Assembled and Composite Nanostructures 5219.5 Introduction to Biophotonics 5369.6 Advanced Biophotonics Applications 545Index 559