The nano-microsystem offers a precise experimental platform through semiconductor microfabrication and automated measurement control. It supports both scientific research and engineering applications, enabling the development of practical, real-world devices.

This book serves as a comprehensive guide to utilising nano-microsystems, covering key concepts, policies, fabrication techniques, and implementation examples. It introduces microfluidic systems, detailing their principles, design, and construction methods. Aimed at scientists who have struggled to construct experimental systems systematically when conducting scientific experiments, and for engineers seeking applied research. Additionally, the book provides novice students with information on nano-microsystems that will be useful for their own research.

Key features:

• Provides a coherent overview of the latest research on novel nano-microsystems for scientific research and engineering applications
• Reviews the design, manufacturing processes, evaluation and applications of nano-microsystems
• Discusses applications including environmental analysis, biomedical analysis, microfluidics, combinatorial synthesis, sensors, droplet and powder transport systems
• Includes the fundamental scientific knowledge underlying nano-microsystems and their applications
• Discusses future research and technologies, including how novel nano-microsystems can be designed and created