Handbook of Surface and Nanometrology

Regarded as one of the world's top authorities on surface and nanometrology, David J. Whitehouse is professor emeritus of engineering science at the University of Warwick, where he was chief scientist in the School of Engineering. He has also been a consultant to numerous organizations, such as Rolls Royce, Taylor Hobson, Kodak, Unilever, General Motors, Caterpillar, 3M, Toshiba Japan, UBM Germany, and the Atomic Weapons Research Establishment. He has published 5 books and more than 250 technical papers, holds 23 patents, and was founding editor of the first peer-reviewed international journal on nanoscale science and technology, Nanotechnology. Professor Whitehouse has been a recipient of many awards, including the Lifetime Achievement Award from the American Society for Precision Engineering, the Champion of Metrology award from the National Physical Laboratory, and the Commemorative Medallion of the Mendeleev Institute of Metrology.

Praise for the First Edition Handbook of Surface and Nanometrology contains a wealth of information for both practical and research engineers. For Taylor Hobson, the volume epitomises the nature of the art of surface metrology and instrument engineering, as could only be recorded through a lifetime of dedication to the subject. This book will give both guidance and food for thought for anyone interested in the subject at whatever level. -Bruce Wilson, Taylor Hobson The book is very useful to the colleagues of my Institute. It will be one of the best books in our library. -Professor Yuri Chugui

• Introduction-Surface and Nanometrology. Characterization. Processing, Operations, and Simulations. Measurement Techniques. Standardization-Traceability-Uncertainty. Surfaces and Manufacture. Surface Geometry and Its Importance in Function. Surface Geometry, Scale of Size Effects, Nanometrology. General Comments. Glossary. Index.