Nanofabrication Handbook

Stefano Cabrini is director of the Nanofabrication Facility and member of the interfacility nanophotonics group and the "single digit nano fabrication" theme in the Molecular Foundry (a U.S. Department of Energy program) at the Lawrence Berkeley National Laboratory. His research interests include nanophotonics and metamaterials, semiconductor device fabrication, optical device fabrication, MEMS fabrication, and the development of new lithographic tools and processes.Satoshi Kawata is a professor of applied physics at Osaka University, chairman of Nanophoton Corp., and chief scientist of the Nanophotonics Laboratory at RIKEN. A fellow of the Optical Society of America, SPIE, and Institute of Physics, Dr. Kawata has been a recipient of the Medal of Purple Ribbon from the Japanese Emperor; the Science and Technology Award from the Japanese Ministry of Education, Culture, Sports, Science and Technology; the Da Vinci Award of Excellence from LMVH Mo�Hennessy Louis Vuitton; and the Japan IBM Science Award. His research interests include nanophotonics, biophotonics, plasmonics, metamaterials, photonic crystals, and nanofabrication through two-photon absorption techniques.

"[T]his book goes beyond the description of most nanofabrication techniques to present several practical applications. ... the profuse use of drawings, illustrations, and pictures will help the reader visualize what is explained and discussed throughout the text. ... both the fundamentals and practical applications related to nanofabrication by lithographic techniques are well covered." -Raul J. Martin-Palma, Journal of Nanophotonics, 2013 "... expertly integrated ... The book is suitable for researchers and engineers in a variety of disciplines. I highly recommend it as a comprehensive introduction to nanofabrication techniques." -Barry R. Masters, Optics & Photonics News "Nanofabrication Handbook is a broad topical introduction to nanofabrication methods and applications. It is rich with illustrations and the authors of the individual chapters have made a real effort to introduce readers to the basic concepts in understandable terms while also capturing the current leading edge in their field. The amazing micrographs of prototype structures that are documented throughout the pages offer an inspiring snapshot of the many and varied accomplishments of the researchers working in these technology development and application fields ... The style used by the authors will allow this volume to serve as a solid introduction to methods in current use in nanoscale research while the breadth of topics will also permit experienced practitioners to learn about methods and applications outside their own areas of experience." -Donald Tennant, Director of Operations, Cornell NanoScale Science and Technology Facility "An impressive work covering all the important nanofabrication topics and contents ... Highly recommended." -Professor Din Ping Tsai, National Taiwan University

• STANDARD LITHOGRAPHY: Introduction to Nanofabrication. Electron Beam Lithography. Nanolithography with Focused Ion Beams. Focused Ion Beam and Electron Beam Deposition. Plasma-Assisted Pattern Transfer at the Nanoscale. Optical Lithography. Soft X-Ray Lithography. Simulations in Micro- and Nanofabrication. NEW LITHOGRAPHIC TECHNIQUES: Nanoimprint Lithography. Scanning Probe Lithography. Two-Photon Lithography. Colloidal Inorganic Nanocrystals: Synthesis and Controlled Assembly. Directed Self Assembly. Self-Assembled DNA Nanostructures and DNA Devices. Emerging New Approaches. NANOFABRICATION APPLICATIONS: Nano-Electro-Mechanical Systems (NEMS). Micro- and Nanofluidics. Fabrication of Nanophotonic Structures. Patterning Magnetic Nanostructures with Ions. Plasmonic Metamaterials. Nanoelectronics. Manipulation and Nanostructuring for Biological Applications.