MEMS

Vikas Choudhary is currently a senior manager of MEMS and Sensor Technology Group at Analog Devices, where he is involved in design and management of products for Inertial MEMS. He also manages a team of engineers involved in the design of high-performance precision analog-to-digital converters. Vikas has more than 18 years of experience in the semiconductor industry, including as the architect and lead designer for several RFIC subsystems such as 802.16e and 802.11n. He has held various management and design positions at PMC-Sierra, Inc., Texas Instruments, and STMicroelectronics. He has three issued patents. His current research interests are in the field of applied signal processing for high-performance analog circuits and systems.Krzysztof (Kris) Iniewski manages R&D at Redlen Technologies, Inc., a startup company in Vancouver, Canada. He is also the president of CMOS Emerging Technologies Research Inc., an organization of high-tech events covering communications, microsystems, optoelectronics, and sensors. Dr. Iniewski has held numerous faculty and management positions at the University of Toronto, University of Alberta, Simon Fraser University, and PMC-Sierra, Inc. He has published more than 100 research papers in international journals and conferences. He holds 18 international patents granted in the United States, Canada, France, Germany, and Japan. He is a frequent invited speaker, has consulted for multiple organizations internationally, and has written and edited several books.

"The book editors have managed to assemble a group of extraordinary authors to provide their expertise to this book. While giving an excellent overview of the history and the state of the art of MEMS technology, this book also focuses on current trends and topics such as gyroscopes that currently experience significant and increasing popularity in research and in industry. It is well written and the material is presented in a well-structured way making it easily accessible to any reader with a technical background."—Boris Stoeber, The University of British Columbia, Vancouver, Canada

• Breakthrough Technology: Microsystems to Nano-Microsystems: A Technological Breakthrough. HfO2-Based High-κ Dielectrics for Use in MEMS Applications. Piezoelectric Thin Films for MEMS Applications. CMOS Systems and Interfaces for sub-deg/hr Microgyroscopes. Bulk Acoustic Wave Gyroscopes. Mechanically Flexible Interconnects and TSVs: Applications in CMOS/MEMS Integration. Modeling of Piezoelectric MEMS Vibration Energy Harvesters. Interface Circuits for Capacitive MEMS Gyroscopes. Electromechanical Loops for High-Performance and Robust Gyroscope System Design. MEMS-Based Novel Applications: Bulk Acoustic Wave Resonators for Mobile Communication Systems. Wideband Ultrasonic Transmitter and Sensor Array for In-Air Applications. MEMS-Based Lamellar Grating Fourier Transform Spectrometers. Microelectromechanical Resonators for RF Applications. Rigid Body Motion Capturing by Means of Wearable Inertial and Magnetic MEMS Sensor Assembly—From Reconstitution of the Posture toward Dead Reckoning: An Application in Bio-Logging. Radio-Controlled Wireless MEMS Actuators and Applications. Advanced MEMS Technologies for Tactile Sensing and Actuation. MEMS-Based Micro Hot-Plate Devices. A Wireless Sensor Networks Enabled Inertial Sensor. Passive Radio-Frequency Acoustic Sensors and Systems for Wired and Wireless Applications. Index.