Rapid Thermal Processing of Semiconductors

AvVictor E. Borisenko,Peter J. Hesketh

Häftad, Engelska, 2013

Del i serien Microdevices

2 369 kr

Beställningsvara. Skickas inom 10-15 vardagar. Fri frakt över 249 kr.

Fler format och utgåvor

Inbunden

2 363 kr

Beskrivning

Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field.

Produktinformation

Utgivningsdatum:2013-06-20
Mått:155 x 235 x 21 mm
Vikt:581 g
Format:Häftad
Språk:Engelska
Serie:Microdevices
Antal sidor:358
Förlag:Springer-Verlag New York Inc.
ISBN:9781489918062

Utforska kategorier

Innehållsförteckning

1. Transient Heating of Semiconductors by Radiation.- 2. Recrystallization of Implanted Layers and Impurity Behavior in Silicon Crystals.- 3. Crystallization, Impurity Diffusion, and Segregation in Polycrystalline Silicon.- 4. Component Evaporation, Defect Annealing, and Impurity Diffusion in the III–V Semiconductors.- 5. Diffusion Synthesis of Silicides in Thin-Film Metal—Silicon Structures.- 6. Rapid Thermal Oxidation and Nitridation.- 7. Rapid Thermal Chemical Vapor Deposition.- References.