MEMS Mechanical Sensors

AvSteve P. Beeby,Graham Ensel

Inbunden, Engelska, 2004

1 463 kr

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Beskrivning

The main aim of this book is to give an overview of MEMS mechanical transducers. The text focuses mainly on examples of commercial and research devices; however, attention is also given to manufacturing techniques and materials, as well as the basic principles behind the operation of these devices.

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