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1. 

   MEMS Mechanical Sensors

   Av Steve P. Beeby, Graham Ensel m. fl.

   Inbunden, 2004

   1547 kr

   Lägg i varukorg

   The main aim of this book is to give an overview of MEMS mechanical transducers. The text focuses mainly on examples of commercial and research devices; however, attention is also given to manufacturing techniques and materials, as well as the basic principles behind the operation of these devices.