Prof. Dr. Dr. h.c. Bernd Rauschenbach studied physics at the Martin-Luther-University Halle-Wittenberg, Germany. Before coming to the Technical University Hamburg as professor in 1990, he was a staff physicist at the Central Institute of Nuclear Research Dresden-Rossendorf for 16 years. During that time, he obtained his first doctoral degree (Dr. rer. nat.) and the second doctoral degree (Dr. sc. nat.) from the Academy of Science. Since 1993 he has been Professor of experimental physics at the University Augsburg. In 2000, he was appointed to Director and Executive Chairman of the Leibniz Institute of Surface Modification (IOM) Leipzig and Professor of applied physics at the Felix Bloch Institute for Solid State Physics of the University Leipzig.His research interests are focused on the study of ion-solid interaction, laser ablation, nanomaterials and the transfer of achieved results to industry. Prof. Rauschenbach authored and coauthored close to 600 peer-reviewed scientificpublications, 28 patents and two book chapters. Professor Rauschenbach was a member of several committees and boards, including reviewer of the Physics of the Condensed Matter Council of the German Science Foundation (DFG), speaker of the Thin Film Division of the German Physical Society (DPG) and member of the board “Innovation and Science”.

• 1.Introduction.- 2.Collision processes.- 3. Energy-loss processes and ion range.- 4. Ion beam induced damage.- 5.Sputtering.- 6.Evolution of topography under low-energy ion bombardment.-  7.Ion beam figuring and smoothing.- 8.Ion beam deposition.- 9.Ion beam assisted deposition.- 10.Ion beam sputtering induced glancing angle deposition.

Prof. Dr. Dr. h.c. Bernd Rauschenbach studied physics at the Martin-Luther-University Halle-Wittenberg, Germany. Before coming to the Technical University Hamburg as professor in 1990, he was a staff physicist at the Central Institute of Nuclear Research Dresden-Rossendorf for 16 years. During that time, he obtained his first doctoral degree (Dr. rer. nat.) and the second doctoral degree (Dr. sc. nat.) from the Academy of Science. Since 1993 he has been Professor of experimental physics at the University Augsburg. In 2000, he was appointed to Director and Executive Chairman of the Leibniz Institute of Surface Modification (IOM) Leipzig and Professor of applied physics at the Felix Bloch Institute for Solid State Physics of the University Leipzig.His research interests are focused on the study of ion-solid interaction, laser ablation, nanomaterials and the transfer of achieved results to industry. Prof. Rauschenbach authored and coauthored close to 600 peer-reviewed scientificpublications, 28 patents and two book chapters. Professor Rauschenbach was a member of several committees and boards, including reviewer of the Physics of the Condensed Matter Council of the German Science Foundation (DFG), speaker of the Thin Film Division of the German Physical Society (DPG) and member of the board “Innovation and Science”.

• 1.Introduction.- 2.Collision processes.- 3. Energy-loss processes and ion range.- 4. Ion beam induced damage.- 5.Sputtering.- 6.Evolution of topography under low-energy ion bombardment.-  7.Ion beam figuring and smoothing.- 8.Ion beam deposition.- 9.Ion beam assisted deposition.- 10.Ion beam sputtering induced glancing angle deposition.