This book serves as a guide for beginners in the areas of thin films preparations, characterization, and device making, while also providing insight into the area for the experts. The advancement in the nanostructured materials for the development of devices is fully explored by the authors. Consistent with chemically deposited metal oxides’ increasing prominence for development of devices such supercapacitors, batteries and sensors, the book is idea for research engineers and technical staff if fabrication facilities.