Piezoelectric MEMS Resonators

Häftad, Engelska, 2018

Del i serien Microsystems and Nanosystems

1 378 kr

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Beskrivning

This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS.

Produktinformation

Utgivningsdatum:2018-07-12
Mått:155 x 235 x 24 mm
Vikt:657 g
Format:Häftad
Språk:Engelska
Serie:Microsystems and Nanosystems
Antal sidor:424
Förlag:Springer International Publishing AG
ISBN:9783319804057

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Mer om författaren

Harmeet "Mitu" Bhugra lead the development of the world's first PiezoElectric MEMS timing and sensor products at IDT. He holds 22 US patents and has published multiple technical papers and given multiple talks on MEMS technology.Prof. Gianluca Piazza is an Associate Professor in the Electrical and Computer Engineering Department at Carnegie Mellon University.

Innehållsförteckning

AIN Thin Film Processing and Basic Properties.- Lead Zirconate Titanate (PZT) for M/NEMS.- Gallium Nitride for M/NEMS.- Lithium Niobate for M/NEMS Resonators.- Quality Factor and Coupling in Piezoelectric MEMS Resonators.- Flexural Piezoelectric Resonators.- Laterally Vibrating Piezoelectric MEMS Resonators.- BAW Piezoelectric Resonators.- Shear Piezoelectric MEMS Resonators.- Temperature Compensation of Piezo-MEMS Resonators.- Computational Modeling Challenges.- Fabrication Process Flows for Implementation of Piezoelectric MEMS Resonators.- Reliability and Quality Assessment (Stability and Packages).- Large Volume Testing and Calibration.- High Frequency Oscillators for Mobile Devices.- BAW Filters and Duplexers for Mobile Communication.