Planar Waveguide Optical Sensors
From Theory to Applications
Häftad, Engelska, 2018
Del i serien Engineering Materials
1 094 kr
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Beskrivning
This book concentrates on the design and development of integrated optic waveguide sensors using silicon based materials. It gives the readers the full background in the field of sensors, reasons for using silicon oxynitride as a potential waveguide material as well as its fabrication processes and possible uses.