Scanning Electron Microscopy

Physics of Image Formation and Microanalysis

AvLudwig Reimer

Inbunden, Engelska, 1998

Del 45 i serien Springer Series in Optical Sciences

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Beskrivning

Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.

Produktinformation

Utgivningsdatum:1998-09-17
Mått:155 x 235 x 35 mm
Vikt:975 g
Format:Inbunden
Språk:Engelska
Serie:Springer Series in Optical Sciences
Antal sidor:529
Upplaga:2
Förlag:Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
ISBN:9783540639763

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Recensioner i media

"...this book is both linguistically and scientifically outstanding. It is an inspiring book for beginners and experienced SEM operators alike. The list of references is especially useful. This volume makes an outstanding contribution to the deeper understanding of the SEM." T Mulvey, Measurement Science and Technology. 11, No12, December 2000

Innehållsförteckning

Electron Optics of a Scanning Electron Microscope.- Electron Scattering and Diffusion.- Emission of Backscattered and Secondary Electrons.- Electron Detectors and Spectrometers.- Image Contrast and Signal Processing.- Electron-Beam-Induced Current and Cathodoluminescence.- Special Techniques in SEM.- Crystal Structure Analysis by Diffraction.- Elemental Analysis and Imaging with X-Rays.