Fabrication of Micro/Nano Structures via Precision Machining

Guoqing Zhang, research professor of Shenzhen University, China. ​ He received his Ph.D degree from The Hong Kong Polytechnic University in 2014. Now, he has been selected as a Shenzhen Peacock Program for Overseas/Professional High-Level Talents. He serves as a Deputy Director of Guangdong Key Laboratory of Electromagnetic Control and Intelligent Robots, Deputy Director of Shenzhen Key Laboratory of High Performance Nontraditional Manufacturing, Committee member of Chinese Mechanical Engineering Society Design Branch, Member of Advanced Optical Manufacturing Young Expert Committee of Chinese Optical Engineering Society. His research interest include ultra-precision machining technology and equipment, robots and intelligent equipment etc..  Bin Xu, associate professor of Shenzhen University, China.​​ He received his Ph.D degree from Shenzhen University in 2013. Now, he serves as a Director of Department of Mechanical and Electronic Engineering. His research interest include micro electrical discharge machining, micro electrochemical machining, laser beam machining etc..  Yanjun Lu, assistant professor of Shenzhen University, China.​​​ He received his Ph.D degree from South China University of Technology in 2015. Now, he serves as the director of the Joint Training Postgraduate Demonstration Base of Guangdong Province, selected as Science and Technology Commissioner of Guangdong Province, 100 innovative doctoral & post-doctoral fellows in Guangdong Province, Shenzhen High-level talents, and senior members of Chinese Mechanical Engineering Society. His research interests include dressing and truing of coarse diamond grinding wheel, micro-structure grinding, micro injection molding of LED light guide plate and biomedical microfluidic chip etc.  Suet To, full professor of The Hong Kong Polytechnic University, Hong Kong, China. She receivedher ​PhD in Ultra-precision Machining Technology from The Hong Kong Polytechnic University. Now, ​she serves as the​ associate director of State Key Laboratory of Ultra-precision Machining Technology and Advanced Optics Manufacturing Centre.  She is an active researcher who focuses on ultra-precision machining and material science. Her research interests include ultra-precision machining, advanced optics manufacturing technology, ultra-precision machining of micro/nano-structure and effect on materials. She has published 3 research books, more than 300 international SCI referred journal papers and over 200 international conference papers, as well as obtained more than 20 patents in China and USA. She has secured more than 20 external projects as Principal Investigator (PI)/ Project Coordinator (PC) and successfully obtained over HK$55 million of research grants. Prof. To holds various honorary positions in professional bodies including Board Member of the AsianSociety for Precision Engineering and Nanotechnology (ASPEN), Committee Member of the Production Engineering Division of the Chinese Society for Mechanical Engineers (CSME) and Associate Member of the International Academy for Production Engineering (CIRP). She also serves as Editorial Board member in several international journals, such as International Journal of Machine Tools and Manufacturing, Journal of Applied Optics, Journal of Nano-manufacturing and Metrology, International Journal of Extreme Manufacturing and Chinese Journal of Mechanical.

• Chapter 1. Introduction, Yuting Ma, Shuaikang Cao and Guoqing Zhang.- Chapter 2. Tool offset flycutting straight-groove-type micro structures, Jianpeng Wang and  Guoqing Zhang.- Chapter 3. Tool offset flycutting multi-layer hierarchical microstructures, Shuai Ma and  Guoqing Zhang.- Chapter 4. Tool offset flycutting micro-optics arrays with high-aspect-ratio, Zhanwen Sun and Suet To.- Chapter 5. Diamond milling system for fabricating infrared micro-optics arrays, Zhanwen Sun and Sujuan Wang.- Chapter 6. Cutting force and energy modelling in ultra-precision machining of micro-structures, Zhejia Zhao, Zhanwen Sun and Suet To.