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1 produkter

1. 

   Plasma Processing for Semiconductor Materials and Thin-Film Devices

   Deposition, Surface Modification, and Etching

   Av Kuan Yew Cheong, Behnam Akhavan m. fl.

   Häftad, 2026

   3338 kr

   Kommande

   Plasma Processing for Semiconductor Materials and Thin-Film Devices covers the state-of-the-art in plasma processing of thin films. The book focuses on fundamental plasma theory, plasma for advanced applications, advanced characterization techniques, plasma and performance in semiconductor devices, …