F.H.P.M. Habraken – författare

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1 produkter

1. 

   LPCVD Silicon Nitride and Oxynitride Films

   Material and Applications in Integrated Circuit Technology

   Av F.H.P.M. Habraken

   Häftad, 1991

   551 kr

   Lägg i varukorg

   The present book collects a broad overview of chemical and physical char­ acteristics of silicon oxynitrides. Special emphasis is put on the way in which these properties influence the electrical characteristics and behaviour of this important material. The results presented here were obtained in …