Joseph M. Steigerwald – författare

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1 produkter

1. 

   Chemical Mechanical Planarization of Microelectronic Materials

   Av Ronald J. Gutmann, Shyam P. Murarka m. fl.

   E-bok, 2008

   2379 kr

   Lägg i varukorg

   Chemical Mechanical Planarization (CMP) plays an important role in today''s microelectronics industry. With its ability to achieve global planarization, its universality (material insensitivity), its applicability to multimaterial surfaces, and its relative cost-effectiveness, CMP is the ideal …