Shyam P. Murarka – författare
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3 produkter
Silicides for VLSI Applications
E-bok, 2012
717 kr
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Most of the subject matter of this book has previously been available only in the form of research papers and review articles. I have not attempted to refer to all the published papers. The reader may find it advantageous to refer to the references listed.
Advanced Metallizations in Microelectronics: Volume 181
Av Avishay Katz, Shyam P. Murarka m. fl.
Häftad, 2014
471 kr
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The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Chemical Mechanical Planarization of Microelectronic Materials
Av Ronald J. Gutmann, Shyam P. Murarka m. fl.
E-bok, 2008
2379 kr
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Chemical Mechanical Planarization (CMP) plays an important role in today''s microelectronics industry. With its ability to achieve global planarization, its universality (material insensitivity), its applicability to multimaterial surfaces, and its relative cost-effectiveness, CMP is the ideal …