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Del 7 - Series on Semiconductor Science and Technology
Plasma Etching
Fundamentals and Applications
Inbunden, Engelska, 1998
3 130 kr
Skickas inom 5-8 vardagar
The focus of this book is the remarkable advances in understanding of low pressure RF (radio frequency) glow discharges. A basic analytical theory and plasma physics are explained. Plasma diagnostics are also covered before the practicalities of etcher use are explored.