Nguyen Van Toan – författare
2 047 kr
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989 kr
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Microfabricated resonators play an essential role in a variety of applications, including mass sensing, timing reference applications, and filtering applications. Many transduction mechanisms including piezoelectric, piezoresistive, and capacitive mechanisms, have been studied to induce and detect the motion of resonators. This book is meant to introduce and suggest several technological approaches together with design considerations for performance enhancement of capacitive silicon resonators, and will be useful for those working in field of micro and nanotechnology.
Features
Introduces and suggests several technological approaches together with design considerations for performance enhancement of capacitive silicon resonators Provides information on the various fabrication technologies and design considerations that can be employed to improve the performance capacitive silicon resonator which is one of the promising options to replace the quartz crystal resonator. Discusses several technological approaches including hermetic packaging based on the LTCC substrate, deep reactive ion etching, neutral beam etching technology, and metal-assisted chemical etching, as well as design considerations for mechanically coupled, selective vibration of high-order mode, movable electrode structures, and piezoresistive heat engines were investigated to achieve small motional resistance, low insertion loss, and high quality factor. Focusses on a capacitive sensing method based on the measurement of the change in capacitance between a sensing electrode and the resonant body. Reviews recent progress in performance enhancement methods for capacitive silicon resonator, which are mainly based on the works of the authors.
989 kr
Läs direkt efter köp
Microfabricated resonators play an essential role in a variety of applications, including mass sensing, timing reference applications, and filtering applications. Many transduction mechanisms including piezoelectric, piezoresistive, and capacitive mechanisms, have been studied to induce and detect the motion of resonators. This book is meant to introduce and suggest several technological approaches together with design considerations for performance enhancement of capacitive silicon resonators, and will be useful for those working in field of micro and nanotechnology.
Features
Introduces and suggests several technological approaches together with design considerations for performance enhancement of capacitive silicon resonators Provides information on the various fabrication technologies and design considerations that can be employed to improve the performance capacitive silicon resonator which is one of the promising options to replace the quartz crystal resonator. Discusses several technological approaches including hermetic packaging based on the LTCC substrate, deep reactive ion etching, neutral beam etching technology, and metal-assisted chemical etching, as well as design considerations for mechanically coupled, selective vibration of high-order mode, movable electrode structures, and piezoresistive heat engines were investigated to achieve small motional resistance, low insertion loss, and high quality factor. Focusses on a capacitive sensing method based on the measurement of the change in capacitance between a sensing electrode and the resonant body. Reviews recent progress in performance enhancement methods for capacitive silicon resonator, which are mainly based on the works of the authors.
336 kr
Läs direkt efter köp
By proposing and forming a mobile manipulator for modern multi-floor buildings, A Robotic Framework for the Mobile Manipulator: Theory and Application helps readers visualize an end-to-end workflow for making a robot system work in a targeted environment. From a product-oriented viewpoint, this book is considered as a bridge from theories to real products, in which robotic software modules and the robotic system integration are mainly concerned. In the end, readers will have an overview of how to build and integrate various single robotic modules to execute a list of designed tasks in the real world, as well as how to make a robot system work independently, without human interventions. With references and execution guidelines provided at the end of each chapter, the book will be a useful tool for developers and researchers looking to expand their knowledge about the robotics and the robotic software.
336 kr
Läs direkt efter köp
By proposing and forming a mobile manipulator for modern multi-floor buildings, A Robotic Framework for the Mobile Manipulator: Theory and Application helps readers visualize an end-to-end workflow for making a robot system work in a targeted environment. From a product-oriented viewpoint, this book is considered as a bridge from theories to real products, in which robotic software modules and the robotic system integration are mainly concerned. In the end, readers will have an overview of how to build and integrate various single robotic modules to execute a list of designed tasks in the real world, as well as how to make a robot system work independently, without human interventions. With references and execution guidelines provided at the end of each chapter, the book will be a useful tool for developers and researchers looking to expand their knowledge about the robotics and the robotic software.
587 kr
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286 kr
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2 280 kr
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The reference text focuses on covering advanced manufacturing processes to fabricate microfluidic and micro-electromechanical system devices. It covers the fabrication of multiple hole arrays for interconnects, surface roughening of glass for microsystems packaging applications, and fabrication, and characterization of through-glass via for micro-electromechanical system packaging applications.
This book:
Presents an overview of subtractive technologies needed to process glass materials for micro-fluidic, and micro-electromechanical system applications Discusses the latest developments in advanced machining techniques based on mechanical energy, chemical energy, plasma energy, and high-temperature methods Covers post-processing techniques employed to facilitate the machined glass substrates for the micro-electromechanical system, micro-fluidic, and lab-on-chip applications Explains advanced techniques such as nonconventional machining processes, hybrid, and sequential machining methods to process glass Illustrates topics such as photoacoustic biosensing, cantilever beam temperature sensor, and parametric effect on machined micro-channelsIt is primarily written for senior undergraduates, graduate students, and academic researchers in the fields of manufacturing engineering, industrial engineering, mechanical engineering, production engineering, materials science, and engineering.
2 280 kr
Läs direkt efter köp
The reference text focuses on covering advanced manufacturing processes to fabricate microfluidic and micro-electromechanical system devices. It covers the fabrication of multiple hole arrays for interconnects, surface roughening of glass for microsystems packaging applications, and fabrication, and characterization of through-glass via for micro-electromechanical system packaging applications.
This book:
Presents an overview of subtractive technologies needed to process glass materials for micro-fluidic, and micro-electromechanical system applications Discusses the latest developments in advanced machining techniques based on mechanical energy, chemical energy, plasma energy, and high-temperature methods Covers post-processing techniques employed to facilitate the machined glass substrates for the micro-electromechanical system, micro-fluidic, and lab-on-chip applications Explains advanced techniques such as nonconventional machining processes, hybrid, and sequential machining methods to process glass Illustrates topics such as photoacoustic biosensing, cantilever beam temperature sensor, and parametric effect on machined micro-channelsIt is primarily written for senior undergraduates, graduate students, and academic researchers in the fields of manufacturing engineering, industrial engineering, mechanical engineering, production engineering, materials science, and engineering.