Takahito Ono - Böcker

Microfabricated resonators play an essential role in a variety of applications, including mass sensing, timing reference applications, and filtering applications. Many transduction mechanisms including piezoelectric, piezoresistive, and capacitive mechanisms, have been studied to induce and detect the motion of resonators. This book is meant to introduce and suggest several technological approaches together with design considerations for performance enhancement of capacitive silicon resonators, and will be useful for those working in field of micro and nanotechnology.FeaturesIntroduces and suggests several technological approaches together with design considerations for performance enhancement of capacitive silicon resonatorsProvides information on the various fabrication technologies and design considerations that can be employed to improve the performance capacitive silicon resonator which is one of the promising options to replace the quartz crystal resonator.Discusses several technological approaches including hermetic packaging based on the LTCC substrate, deep reactive ion etching, neutral beam etching technology, and metal-assisted chemical etching, as well as design considerations for mechanically coupled, selective vibration of high-order mode, movable electrode structures, and piezoresistive heat engines were investigated to achieve small motional resistance, low insertion loss, and high quality factor.Focusses on a capacitive sensing method based on the measurement of the change in capacitance between a sensing electrode and the resonant body. Reviews recent progress in performance enhancement methods for capacitive silicon resonator, which are mainly based on the works of the authors.

This book brings together investigations which combine theoretical and experimental results related to such systems as flexure hinges and compliant mechanisms for precision applications, the non-linear analytical modeling of compliant mechanisms, mechanical systems using compliance as a bipedal robot and reconfigurable tensegrity systems and micro-electro-mechanical systems (MEMS) as energy efficient micro-robots, microscale force compensation, magnetoelectric micro-sensors, acoustical actuators and the wafer bonding as a key technology for the MEMS fabrication. The book gathers the contributions presented at the 7th Conference on Microactuators, Microsensors and Micromechanisms (MAMM), held in Ho Chi Minh City, Vietnam, in November 2024. The aim of the conference was to provide a special opportunity for a know-how exchange and collaboration in various disciplines concerning systems pertaining to micro-technology.  The conference was organized under the patronage of International Federation for the Promotion of Mechanism and Machine Science (IFToMM).