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1. 

   Advances in Chemical Mechanical Planarization (CMP)

   Av Suryadevara Babu, Babu Suryadevara

   Inbunden, 2016

   2689 kr

   Lägg i varukorg

   Advances in Chemical Mechanical Planarization (CMP) provides the latest information on a mainstream process that is critical for high-volume, high-yield semiconductor manufacturing, and even more so as device dimensions continue to shrink. The technology has grown to encompass the removal and …