Advances in Chemical Mechanical Planarization (CMP)

Babu Suryadevara is distinguished professor and former director of the Center for Advanced Materials Processing (CAMP) at Clarkson University, United States. His research interests include CMP of metal and dielectric films, CMP for shallow-trench isolation, particle-free solutions for CMP, and post-CMP cleaning.

• IntroductionPart I CMP of dielectric and metal films1 Chemical and physical mechanisms of dielectric CMP 2 Cu CMP Challenges in 22 nm BEOL and beyond3 Electrochemical techniques and their applications for CMP of metal films4 Ultra low-k materials and CMP5 CMP processing of high-mobility channel materials; alternatives to Si 6 Multiscale modeling of CMP 7 Chemical mechanical polishing (CMP) of silicon carbide (SiC) 8 Chemical and physical mechanisms of CMP of gallium nitride9 Abrasive-free and ultralow abrasive CMP processes 10 Environmental aspects of planarization processesPart II Consumables and Process Control for Improved CMP11 Preparation and characterization of slurry for CMP12 Chemical Metrology Methods for CMP Quality13 Diamond Disc Pad Conditioning in Chemical Mechanical Polishing14 Characterization of surface processes during oxide CMP by in situ FTIR spectroscopy 15 A novel slurry injection system for CMP16 CMP removal rate uniformity and role of carrier parameters 17 Approaches to defect characterization, mitigation and reduction18 Applications of CMP to More than Moore Devices 19 CMP for phase change materials