W. N. G. Hitchon – författare
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3 produkter
Plasma Processes for Semiconductor Fabrication
Av W. N. G. Hitchon, Haroon Ahmad m. fl.
Häftad, 2005
1253 kr
Lägg i varukorg
Plasma processing is a central technique in the fabrication of semiconductor devices. This self-contained book provides an up-to-date description of plasma etching and deposition in semiconductor fabrication. It presents the basic physics and chemistry of these processes, and shows how they can be …
Plasma Processes for Semiconductor Fabrication
Av W. N. G. Hitchon, Haroon Ahmad m. fl.
Inbunden, 1999
2149 kr
Lägg i varukorg
Plasma processing is a central technique in the fabrication of semiconductor devices. This self-contained book provides an up-to-date description of plasma etching and deposition in semiconductor fabrication. It presents the basic physics and chemistry of these processes, and shows how they can be …