Marc J. Madou, University of California, Irvine USA.

"… the alpha and omega textbook of micro and nanofabrication and technology. … Madou’s explanations often provide new perspectives to those who are more experienced. … this feat of compressing a half century of science and engineering into one set of books makes them useful for years to come. The volumes can easily and aptly serve as course resources for students or as reference books for professionals. Summing Up: Recommended."—CHOICE Magazine"… offers the widest and yet the most detailed coverage of all essential and fundamental aspects of microfabrication and nanotechnology. The author has done an excellent and remarkable job in synthesizing such diverse material under a single umbrella."—Suman Chakraborty, IIT Kharagpur, India"Once again, Professor Madou has made an incredible contribution to the MEMS/NEMS global community in writing this series of books."—Nico de Rooij, Director, Institute of Microengineering, EPFL, Switzerland"… [the new three-volume format] has the potential to become a 'classic' just like the one-volume predecessor… easy to read, and I found some concepts explained in ways I hadn’t heard before… Very ambitious, very informative, very good for teaching!"—Jorg P. Kutter, Technical University of Denmark

• Volume 1: Historical Note: The Ascent of Silicon, MEMS, and NEMS. Crystallography. Quantum Mechanics and the Band Theory of Solids. Silicon Single Crystal Is Still King. Photonics. Fluidics. Electrochemical and Optical Analytical Techniques. Volume 2: Lithography. Pattern Transfer with Subtractive Techniques. Pattern Transfer with Additive Techniques. Volume 3: From Traditional Manufacturing to Nanotechnology. Scaling Laws, Actuators, and Power and Brains in Miniature Devices.

Marc J. Madou, University of California, Irvine USA.

"… the alpha and omega textbook of micro and nanofabrication and technology. … Madou’s explanations often provide new perspectives to those who are more experienced. … this feat of compressing a half century of science and engineering into one set of books makes them useful for years to come. The volumes can easily and aptly serve as course resources for students or as reference books for professionals. Summing Up: Recommended."—CHOICE Magazine"… offers the widest and yet the most detailed coverage of all essential and fundamental aspects of microfabrication and nanotechnology. The author has done an excellent and remarkable job in synthesizing such diverse material under a single umbrella."—Suman Chakraborty, IIT Kharagpur, India"Once again, Professor Madou has made an incredible contribution to the MEMS/NEMS global community in writing this series of books."—Nico de Rooij, Director, Institute of Microengineering, EPFL, Switzerland"… [the new three-volume format] has the potential to become a 'classic' just like the one-volume predecessor… easy to read, and I found some concepts explained in ways I hadn’t heard before… Very ambitious, very informative, very good for teaching!"—Jorg P. Kutter, Technical University of Denmark

• Volume 1: Historical Note: The Ascent of Silicon, MEMS, and NEMS. Crystallography. Quantum Mechanics and the Band Theory of Solids. Silicon Single Crystal Is Still King. Photonics. Fluidics. Electrochemical and Optical Analytical Techniques. Volume 2: Lithography. Pattern Transfer with Subtractive Techniques. Pattern Transfer with Additive Techniques. Volume 3: From Traditional Manufacturing to Nanotechnology. Scaling Laws, Actuators, and Power and Brains in Miniature Devices.

Marc J. Madou, University of California, Irvine USA.

"… the alpha and omega textbook of micro and nanofabrication and technology. … Madou’s explanations often provide new perspectives to those who are more experienced. … this feat of compressing a half century of science and engineering into one set of books makes them useful for years to come. The volumes can easily and aptly serve as course resources for students or as reference books for professionals. Summing Up: Recommended."—CHOICE Magazine"… offers the widest and yet the most detailed coverage of all essential and fundamental aspects of microfabrication and nanotechnology. The author has done an excellent and remarkable job in synthesizing such diverse material under a single umbrella."—Suman Chakraborty, IIT Kharagpur, India"Once again, Professor Madou has made an incredible contribution to the MEMS/NEMS global community in writing this series of books."—Nico de Rooij, Director, Institute of Microengineering, EPFL, Switzerland"… [the new three-volume format] has the potential to become a 'classic' just like the one-volume predecessor… easy to read, and I found some concepts explained in ways I hadn’t heard before… Very ambitious, very informative, very good for teaching!"—Jorg P. Kutter, Technical University of Denmark

• Volume 1: Historical Note: The Ascent of Silicon, MEMS, and NEMS. Crystallography. Quantum Mechanics and the Band Theory of Solids. Silicon Single Crystal Is Still King. Photonics. Fluidics. Electrochemical and Optical Analytical Techniques. Volume 2: Lithography. Pattern Transfer with Subtractive Techniques. Pattern Transfer with Additive Techniques. Volume 3: From Traditional Manufacturing to Nanotechnology. Scaling Laws, Actuators, and Power and Brains in Miniature Devices.