Surface Metrology for Micro- and Nanofabrication

AvWei Gao

Häftad, Engelska, 2020

Del i serien Micro and Nano Technologies

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Beskrivning

Surface Metrology for Micro- and Nanofabrication presents state-of-the-art measurement technologies for surface metrology in fabrication of micro- and nanodevices or components. This includes the newest general-purpose scanning probe microscopes, and both contact and non-contact surface profilers. In addition, the book outlines characterization and calibration techniques, as well as in-situ, on-machine, and in-process measurements for micro- and nanofabrication.

Provides materials scientists and engineers with an informed overview of the state-of-the-art in surface metrology
Helps readers select and design the optimized surface metrology systems and carry out proper surface metrology practices in the fabrication of micro/nano-devices and components
Assesses the best techniques for repairing micro-defects

Produktinformation

Utgivningsdatum:2020-10-21
Mått:191 x 235 x undefined mm
Vikt:910 g
Format:Häftad
Språk:Engelska
Serie:Micro and Nano Technologies
Antal sidor:448
Förlag:Elsevier Science
ISBN:9780128178508

Utforska kategorier

Maskinteknik och material inom Naturvetenskap och teknik

Mer om författaren

Prof. Wei Gao is the Chair of the Precision Nanometrology Laboratory and Director of the Research Center for Precision Nanosystems at the Department of Fine Mechanics in the Graduate School of Engineering, Tohoku University, Japan. His research focuses on precision engineering, precision metrology, micro/nano-nanometrology, optical sensors, surface metrology, on-machine and in-process measurement, and motion measurement.

Innehållsförteckning

1. Noncontact Scanning Electrostatic Force Microscope2. Quartz Tuning Fork Atomic Force Microscope3. Micropipette Ball Probing System4. Low-Force Elastic Beam Surface Profiler5. Linear-Scan Micro Roundness Measuring Machine6. Micro-Gear Measuring Machine7. On-Machine Length Gauge Surface Profiler8. On-Machine Air-Bearing Surface Profiler9. On-Machine Atomic Force Microscope10. On-Machine Roll Profiler11. In-Process Fast Tool Servo Profiler12. Self-Calibration of Prove Tip Radius and Cutting Edge Sharpness