Stephen A. Campbell is Professor of Electrical and Computer Engineering at the University of Minnesota, Distinguished Professor of the Institute of Technology, Director of the Nanofabrication Center, and Director of the Center for Nanostructure Applications. He has extensive experience in both academia and industry in microelectronic processing. His current research interests include the application of semiconductor nanoparticles for high performance electronic and optoelectronic devices, advanced materials, novel sensors and transistor structures, and various applications of MEMS.

• 1. An Introduction to Microelectronic Fabrication ; 2. Semiconductor Substrates ; 3. Diffusion ; 4. Thermal Oxidation ; 5. Ion Implantation ; 6. Rapid Thermal Processing ; 7. Optical Lithography ; 8. Photoresists ; 9. Nonoptical Lithographic Techniques ; 10. Vacuum Science and Plasmas ; 11 . Etching ; 12. Physical Deposition: Evaporation and Sputtering ; 13. Chemical Vapor Deposition ; 14. Epitaxial Growth ; 15. Device Isolation, Contacts, and Metallization ; 16. CMOS Technologies ; 17. Other Transistor Technologies ; 18. Optoelectronic Technologies ; 19. MEMS. ; 20. Integrated Circuit Manufacturing ; Acronyms and Common Symbols ; Properties of Selected Semiconductor Materials ; Physical Constants ; Conversion Factors ; Some properties of the Error Function ; F Values ; Index

Stephen A. Campbell is Professor of Electrical and Computer Engineering at the University of Minnesota, Distinguished Professor of the Institute of Technology, Director of the Nanofabrication Center, and Director of the Center for Nanostructure Applications. He has extensive experience in both academia and industry in microelectronic processing. His current research interests include the application of semiconductor nanoparticles for high performance electronic and optoelectronic devices, advanced materials, novel sensors and transistor structures, and various applications of MEMS.

• 1. An Introduction to Microelectronic Fabrication ; 2. Semiconductor Substrates ; 3. Diffusion ; 4. Thermal Oxidation ; 5. Ion Implantation ; 6. Rapid Thermal Processing ; 7. Optical Lithography ; 8. Photoresists ; 9. Nonoptical Lithographic Techniques ; 10. Vacuum Science and Plasmas ; 11 . Etching ; 12. Physical Deposition: Evaporation and Sputtering ; 13. Chemical Vapor Deposition ; 14. Epitaxial Growth ; 15. Device Isolation, Contacts, and Metallization ; 16. CMOS Technologies ; 17. Other Transistor Technologies ; 18. Optoelectronic Technologies ; 19. MEMS. ; 20. Integrated Circuit Manufacturing ; Acronyms and Common Symbols ; Properties of Selected Semiconductor Materials ; Physical Constants ; Conversion Factors ; Some properties of the Error Function ; F Values ; Index

Stephen A. Campbell is Professor of Electrical and Computer Engineering at the University of Minnesota, Distinguished Professor of the Institute of Technology, Director of the Nanofabrication Center, and Director of the Center for Nanostructure Applications. He has extensive experience in both academia and industry in microelectronic processing. His current research interests include the application of semiconductor nanoparticles for high performance electronic and optoelectronic devices, advanced materials, novel sensors and transistor structures, and various applications of MEMS.

• 1. An Introduction to Microelectronic Fabrication ; 2. Semiconductor Substrates ; 3. Diffusion ; 4. Thermal Oxidation ; 5. Ion Implantation ; 6. Rapid Thermal Processing ; 7. Optical Lithography ; 8. Photoresists ; 9. Nonoptical Lithographic Techniques ; 10. Vacuum Science and Plasmas ; 11 . Etching ; 12. Physical Deposition: Evaporation and Sputtering ; 13. Chemical Vapor Deposition ; 14. Epitaxial Growth ; 15. Device Isolation, Contacts, and Metallization ; 16. CMOS Technologies ; 17. Other Transistor Technologies ; 18. Optoelectronic Technologies ; 19. MEMS. ; 20. Integrated Circuit Manufacturing ; Acronyms and Common Symbols ; Properties of Selected Semiconductor Materials ; Physical Constants ; Conversion Factors ; Some properties of the Error Function ; F Values ; Index