Digital Holography for MEMS and Microsystem Metrology

Anand Asundi, Nanyang Technological University, SingaporeAnand Asundi is Professor and Deputy Director of the Advanced Materials Research Centre at Nanyang Technological University in Singapore. His research interests are in photomechanics and optical sensors & he has published over 200 papers in peer-reviewed journals and presented invited and plenary talks at international conferences. He has also chaired and organized numerous conferences in Singapore and other parts of the world.He is Editor of Optics and Lasers in Engineering and on the Board of Directors of SPIE, and a fellow of the Institute of Engineers, Singapore and SPIE. He also holds advisory professorial appointments at Tongji University, Shanghai University and Harbin Institute of Technology, China. He is Chairman of the Asian Committee on Experimental Mechanics and the Asia Pacific Committee on Smart and Nano Materials both of which he co-founded.

• About the Editor xi Contributors xiiiSeries Preface xviiAcknowledgements xixAbbreviations xxi1 Introduction 1Anand Asundi2 Digital Reflection Holography and Applications 7Vijay R. Singh and Anand Asundi2.1 Introduction to Digital Holography and Methods 72.1.1 Holography and Digital Holography 72.1.2 Digital Recording Mechanism 92.1.3 Numerical Reconstruction Methods 102.2 Reflection Digital Holographic Microscope (DHM) Systems Development 132.2.1 Optical Systems and Methodology 132.3 3D Imaging, Static and Dynamic Measurements 232.3.1 Numerical Phase and 3D Measurements 232.3.2 Digital Holographic Interferometry 252.4 MEMS/Microsystems Characterization Applications 312.4.1 3D Measurements 312.4.2 Static Measurements and Dynamic Interferometric Measurement 352.4.3 Vibration Analysis 39References 503 Digital Transmission Holography and Applications 51Qu Weijuan3.1 Historical Introduction 513.2 The Foundation of Digital Holography 533.2.1 Theoretical Analysis of Wavefront Interference 583.2.2 Digital Hologram Recording and Reconstruction 703.2.3 Different Numerical Reconstruction Algorithms 713.3 Digital Holographic Microscopy System 733.3.1 Digital Holographic Microscopy with Physical Spherical Phase Compensation 743.3.2 Lens-Less Common-Path Digital Holographic Microscope 793.3.3 Common-Path Digital Holographic Microscope 843.3.4 Digital Holographic Microscopy with Quasi-Physical Spherical Phase Compensation: Light with Long Coherence Length 923.3.5 Digital Holographic Microscopy with Quasi-Physical Spherical Phase Compensation: Light with Short Coherence Length 993.4 Conclusion 102References 1044 Digital In-Line Holography and Applications 109Taslima Khanam4.1 Background 1094.2 Digital In-Line Holography 1114.2.1 Recording and Reconstruction 1114.3 Methodology for 2D Measurement of Micro-Particles 1144.3.1 Numerical Reconstruction, Pre-Processing and Background Correction 1144.3.2 Image Segmentation 1164.3.3 Particle Focusing 1174.3.4 Particle Size Measurement 1184.4 Validation and Performance of the 2D Measurement Method 1204.4.1 Verification of the Focusing Algorithm 1214.4.2 Spherical Beads on a Glass Slide 1234.4.3 Microspheres in a Flowing System 1244.4.4 10 mm Microspheres Suspension 1254.4.5 Measurement of Microfibers 1254.5 Methodology for 3D Measurement of Micro-Fibers 1284.5.1 Method 1: The 3D Point Cloud Method 1294.5.2 Method 2: The Superimposition Method 1304.6 Validation and Performance of the 3D Measurement Methods 1344.6.1 Experiment with a Single Fiber 1344.6.2 3D Measurements of Micro-Fibers in Suspension 1354.7 Conclusion 136References 1375 Other Applications 1395.1 Recording Plane Division Multiplexing (RDM) in Digital Holography for Resolution Enhancement 141Caojin Yuan and Hongchen Zhai5.1.1 Introduction of the Recording Plane Division Multiplexing Technique 1415.1.1.1 The SM Technique 1425.1.1.2 The ADM Technique 1435.1.1.3 The WDM Technique 1455.1.1.4 The PM Technique 1465.1.2 RDM Implemented in Pulsed Digital Holography for Ultra-Fast Recording 1475.1.2.1 Introduction 1475.1.2.2 AMD in the Pulsed Digital Holography 1485.1.2.3 WDM in Pulsed Digital Holography 1505.1.3 RDM Implemented by Digital Holography for Spatial Resolution Enhancement 1525.1.3.1 Introduction 1525.1.3.2 AMD in Digital Holography 1535.1.3.3 AMD and PM in Digital Holography 1565.1.4 Conclusion 159References 1605.2 Development of Digital Holographic Tomography 161Yu Yingjie5.2.1 Introduction 1615.2.2 Classification of Digital Holographic Tomography 1625.2.3 Principle of Digital Holographic Tomography 1665.2.3.1 Principle of Digital Holography 1665.2.3.2 Reconstruction Principle of Computer Tomography 1665.2.3.3 CT Reconstruction Algorithms 1685.2.4 Application of DHT 1705.2.4.1 Detection of Biological Tissue 1705.2.4.2 Material Detection 172References 1755.3 Digital Holographic Interferometry for Phase Distribution Measurement 177Jianlin Zhao5.3.1 Measurement Principle of Digital Holographic Interferometry 1775.3.1.1 Principle of Phase Measurement of the Object Wave Field 1785.3.1.2 Principle of Digital Holographic Interferometry 1805.3.2 Applications of Digital Holographic Interferometry in Surface Profile Testing of MEMS/MOEMS 1835.3.3 Applications of Digital Holographic Interferometry in Measuring Refractive Index Distribution 1855.3.3.1 Measurement of Light-Induced Index Change in Photorefractive Crystals 1865.3.3.2 Measurement of Acoustic Standing Wave Field 1915.3.3.3 Measurement of Plasma Plume Field 1925.3.3.4 Measurement of Temperature Distribution in Air Field 1935.3.3.5 Visualization Measurement of Turbulent Flow Field in Water 194References 1956 Conclusion 199Anand AsundiIndex 201