Wiley Microsystem and Nanotechnology Series – serie

Over half a century after the discovery of the piezoresistive effect, microsystem technology has experienced considerable developments. Expanding the opportunities of microelectronics to non-electronic systems, its number of application fields continues to increase. Microsensors are one of the most important fields, used in medical applications and micromechanics. Microfluidic systems are also a significant area, most commonly used in ink-jet printer heads. This textbook focuses on the essentials of microsystems technology, providing a knowledgeable grounding and a clear path through this well-established scientific dicipline. With a methodical, student-orientated approach, Introduction to Microsystem Technology covers the following: microsystem materials (including silicon, polymers and thin films), and the scaling effects of going micro;fabrication techniques based on different material properties, descriptions of their limitations and functional and shape elements produced by these techniques;sensors and actuators based on elements such as mechanical, fluidic, and thermal (yaw rate sensor components are described);the influence of technology parameters on microsystem properties, asking, for example, when is the function of a microsystem device robust and safe?The book presents problems at the end of each chapter so that you may test your understanding of the key concepts (full solutions for these are given on an accompanying website). Practical examples are included also, as well as case studies that enable a better understanding of the technology as a whole. With its extensive treatment on the fundamentals of microsystem technology, this book also serves as a compendium for engineers and technicians working with microsystem technology.

Presenting cutting-edge research and development within multiscale modeling techniques and frameworks, Multiscale Analysis of Deformation and Failure of Materials systematically describes the background, principles and methods within this exciting new & interdisciplinary field. The author’s approach emphasizes the principles and methods of atomistic simulation and its transition to the nano and sub-micron scale of a continuum, which is technically important for nanotechnology and biotechnology. He also pays close attention to multiscale analysis across the micro/meso/macroscopy of a continuum, which has a broad scope of applications encompassing different disciplines and practices, and is an essential extension of mesomechanics.Of equal interest to engineers, scientists, academics and students, Multiscale Analysis of Deformation and Failure of Materials is a multidisciplinary text relevant to those working in the areas of materials science, solid and computational mechanics, bioengineering and biomaterials, and aerospace, automotive, civil, and environmental engineering.   Provides a deep understanding of multiscale analysis and its implementationShows in detail how multiscale models can be developed from practical problems and how to use the multiscale methods and software to carry out simulationsDiscusses two interlinked categories of multiscale analysis; analysis spanning from the atomistic to the micro-continuum scales, and analysis across the micro/meso/macro scale of continuum.

Micro-Cutting: Fundamentals and Applications comprehensively covers the state of the art research and engineering practice in micro/nano cutting: an area which is becoming increasingly important, especially in modern micro-manufacturing, ultraprecision manufacturing and high value manufacturing.This book provides basic theory, design and analysis of micro-toolings and machines, modelling methods and techniques, and integrated approaches for micro-cutting. The fundamental characteristics, modelling, simulation and optimization of micro/nano cutting processes are emphasized with particular reference to the predictabilty, producibility, repeatability and productivity of manufacturing at micro and nano scales.The fundamentals of micro/nano cutting are applied to a variety of machining processes including diamond turning, micromilling, micro/nano grinding/polishing, ultraprecision machining, and the design and implementation of micro/nano cutting process chains and micromachining systems.Key features• Contains contributions from leading global experts• Covers the fundamental theory of micro-cutting• Presents applications in a variety of machining processes• Includes examples of how to implement and apply micro-cutting for precision and micro-manufacturingMicro-Cutting: Fundamentals and Applications is an ideal reference for manufacturing engineers, production supervisors, tooling engineers, planning and application engineers, as well as machine tool designers. It is also a suitable textbook for postgraduate students in the areas of micro-manufacturing, micro-engineering and advanced manufacturing methods.

Approaching the topic of digital holography from the practical perspective of industrial inspection, Digital Holography for MEMS and Microsystem Metrology describes the process of digital holography and its growing applications for MEMS characterization, residual stress measurement, design and evaluation, and device testing and inspection. Asundi also provides a thorough theoretical grounding that enables the reader to understand basic concepts and thus identify areas where this technique can be adopted. This combination of both practical and theoretical approach will ensure the book's relevance and appeal to both researchers and engineers keen to evaluate the potential of digital holography for integration into their existing machines and processes. Addresses particle characterization where digital holography has proven capability for dynamic measurement of particles in 3D for sizing and shape characterization, with applications in microfluidics as well as crystallization and aerosol detection studies.Discusses digital reflection holography, digital transmission holography, digital in-line holography, and digital holographic tomography and applications.Covers other applications including micro-optical and diffractive optical systems and the testing of these components, and bio-imaging.

Nanoscale pattern transfer technology using molds is a rapidly advancing area and one that has seen much recent attention due to its potential for use in nanotechnology industries and applications. However, because of these rapid advances, it can be difficult to keep up with the technological trends and the latest cutting-edge methods. In order to fully understand these pioneering technologies, a comprehensive understanding of the basic science and an overview of the techniques are required.Nanoimprint Technology: Nanotransfer for Thermoplastic and Photocurable Polymers covers the latest nanotransfer science based on polymer behaviour. Polymer fluid dynamics are described in detail, and injection moulding, nanoimprint lithography and micro contact printing are also discussed. Cutting-edge nanotransfer technologies and applications are also considered and future trends in industry are examined.Key features:• Covers the fundamentals of nanoimprint technology• Presents cutting-edge techniques and applications• Provides industrial examples and describes the mold fabrication process• Considers nanotransfer of thermoplastics by simulation• Describes the design and evaluation of UV curable polymerNanoimprint Technology: Nanotransfer for Thermoplastic and Photocurable Polymers is a comprehensive reference for industry engineers as well as graduate and undergraduate students, and is a useful source of information for anyone looking to improve their understanding of nanotransfer mechanisms and methods.

Research in nano and cell mechanics has received much attention from the scientific community as a result of society needs and government initiatives to accelerate developments in materials, manufacturing, electronics, medicine and healthcare, energy, and the environment. Engineers and scientists are currently engaging in increasingly complex scientific problems that require interdisciplinary approaches. In this regard, studies in this field draw from fundamentals in atomistic scale phenomena, biology, statistical and continuum mechanics, and multiscale modeling and experimentation. As a result, contributions in these areas are spread over a large number of specialized journals, which prompted the Editors to assemble this book.Nano and Cell Mechanics: Fundamentals and Frontiers brings together many of the new developments in the field for the first time, and covers fundamentals and frontiers in mechanics to accelerate developments in nano- and bio-technologies.Key features:• Provides an overview of recent advances in nano and cell mechanics.• Covers experimental, analytical, and computational tools used to investigate biological and nanoscale phenomena.•  Covers fundamentals and frontiers in mechanics to accelerate developments in nano- and bio-technologies.• Presents multiscale-multiphysics modeling and experimentation techniques.• Examines applications in materials, manufacturing, electronics, medicine and healthcare.Nano and Cell Mechanics: Fundamentals and Frontiers is written by internationally recognized experts in theoretical and applied mechanics, applied physics, chemistry, and biology. It is an invaluable reference for graduate students of nano- and bio-technologies, researchers in academia and industry who are working in nano and cell mechanics, and practitioners who are interested in learning about the latest analysis tools. The book can also serve as a text for graduate courses in theoretical and applied mechanics, mechanical engineering, materials science, and applied physics.

Discover a comprehensive look at the principles and applications of microsystem dynamics Microsystems or microelectromechanical systems (MEMS) are miniaturized devices with components measured in micrometers that perform micro- to nanometer scale electronic machine functions such as actuations. Since research and industrial production in recent decades has generated considerable knowledge of microsystem dynamics, there is an urgent need for a single guide which combines microsystem theory with practical applications to provide a general framework. Microsystem Dynamics fills this need, with the first single-volume overview of its kind. It presents the fundamental principles of microsystem dynamics in a unified theoretical framework, engineered to govern both analysis and design. Its discussion of applications includes cutting-edge methods for applying non-stationary, stochastic, non-linear dynamics and multi-physics of microsystems. Fully engaged with the latest research, this promises to be the essential single-volume introduction to its subject. Microsystem Dynamics readers will find: Discussion of advanced tools such as nonlinear signal processing, computational intelligence, and nonlinear chaos dynamicsAn authorial team with extensive experience in both academic and industrial research Analysis of stability and durability factors in dynamical microsystemsMicrosystem Dynamics is a useful reference for researchers and practitioners working in microscale engineering, as well as graduate students in mechanical, automotive, and electrical engineering.

Mechanics of MicrosystemsAlberto Corigliano, Raffaele Ardito, Claudia Comi, Attilio Frangi, Aldo Ghisi and Stefano Mariani, Politecnico di Milano, Italy  A mechanical approach to microsystems, covering fundamental concepts including MEMS design, modelling and reliability  Mechanics of Microsystems takes a mechanical approach to microsystems and covers fundamental concepts including MEMS design, modelling and reliability. The book examines the mechanical behaviour of microsystems from a ‘design for reliability’ point of view and includes examples of applications in industry.Mechanics of Microsystems is divided into two main parts. The first part recalls basic knowledge related to the microsystems behaviour and offers an overview on microsystems and fundamental design and modelling tools from a mechanical point of view, together with many practical examples of real microsystems. The second part covers the mechanical characterization of materials at the micro-scale and considers the most important reliability issues (fracture, fatigue, stiction, damping phenomena, etc) which are fundamental to fabricate a real working device.    Key features: Provides an overview of MEMS, with special focus on mechanical-based Microsystems and reliability issues.Includes examples of applications in industry.Accompanied by a website hosting supplementary material.    The book provides essential reading for researchers and practitioners working with MEMS, as well as graduate students in mechanical, materials and electrical engineering.