Run-to-Run Control in Semiconductor Manufacturing

Inbunden, Engelska, 2000

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Beskrivning

Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.

Produktinformation

Utgivningsdatum:2000-11-30
Mått:156 x 234 x 22 mm
Vikt:625 g
Format:Inbunden
Språk:Engelska
Antal sidor:366
Förlag:Taylor & Francis Inc
ISBN:9780849311789

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Mer om författaren

James Moyne, Enrique del Castillo, Arnon M. Hurwitz

Innehållsförteckning

Introduction. Background. Identifying Target Applications for Run-to-Run Control. Developing a Run-to-Run Solution: Run-to-Run Algorithms. Developing a Run-to-Run Solution: Practical Extensions to Algorithms. Developing and Deploying Run-to-Run Solutions: Integrating Control. Run-to-Run Control System Deployment Case Studies. Advanced Topics. Conclusions. References.

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