Modelling of Microfabrication Systems

AvRaja Nassar,Weizhong Dai

Häftad, Engelska, 2010

Del i serien Microtechnology and MEMS

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Beskrivning

This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography.

Produktinformation

Utgivningsdatum:2010-12-08
Mått:155 x 235 x 16 mm
Vikt:429 g
Format:Häftad
Språk:Engelska
Serie:Microtechnology and MEMS
Antal sidor:270
Förlag:Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
ISBN:9783642055362

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Recensioner i media

From the reviews: "This book is aimed at people working on simulation and optimization process fabrication of Microelectromechanical Systems (MEMS). ... the book provides a fairly complete view of the modeling of microfabrication processes. ... 'It will be invaluable to scientists, engineers, graduate students, and manufacturers engaged in research and development for enhancing the accuracy and precision of microfabrication systems for commercial applications'." (Gregory Guisbiers, Physicalia, Vol. 26 (1), 2004)