Design and Manufacturing of Active Microsystems
AvStephanus Büttgenbach,Arne Burisch
Inbunden, Engelska, 2011
Del i serien Microtechnology and MEMS
1 589 kr
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Beskrivning
This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle.
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