Diffractive Image Microscopy for 3D Imaging

Dr. Liang-Chia Chen is a distinguished professor in the Department of Mechanical Engineering at National Taiwan University (NTU), Taiwan. Before his academic career at NTU, he worked as a full-time research engineer at Gerard Industries of Australia (Clipsal) and the Institute of Nuclear Energy Research (INER) of Taiwan for over 15 years. Before joining NTU, he served as a distinguished professor at National Taipei University of Technology in Taipei and as an adjunct professor at the University of South Australia in Australia. His primary research fields are precision metrology and manufacturing, semiconductor metrology, automated optical inspection (AOI), AI-powered metrology, opto-mechatronics instrumentation, and 3D machine vision and algorithms for automation. Mr. Wei-Hsin Chein received his M.S. in Mechanical Engineering from National Taiwan University. His research focuses on optical critical dimension (OCD) metrology, inverse problems, and semiconductor advanced packaging. Sanjeev Kumar Singh earned his Master degree in Mechanical Engineering from National Taiwan University (NTU). His research focuses on optical metrology, automated optical inspection (AOI), and opto-mechatronics instrumentation.Dr. Guo-Wei Wu earned his Ph.D. in Mechanical Engineering from National Taiwan University (NTU). His research focuses on optical metrology, automated optical inspection (AOI), and opto-mechatronics instrumentation.

• Introduction.- Related techniques.- Theoretical background.- Formation of diffractive Images.- ANN based methodology.- System design and experiment setup.- Experimental results and analysis.- Summary.