Loucas G. Christophorou - Böcker

The Seventh International Symposium on Gaseous Dielectrics was held in Knoxville, Tennessee, U. S. A. , on April 24-28, 1994. The symposium continued the interdisciplinary character and comprehensive approach of the preceding six symposia. Gaseous DielecIries VII is a detailed record of the symposium proceedings. It covers recent advances and developments in a wide range of basic, applied and industrial areas of gaseous dielectrics. It is hoped that Gaseous DielecIries VII will aid future research and development in, and encourage wider industrial use of, gaseous dielectrics. The Organizing Committee of the Seventh International Symposium on Gaseous Dielectrics consisted of G. Addis (U. S. A. ), L. G. Christophorou (U. S. A. ), F. Y. Chu (Canada), A. H. Cookson (U. S. A. ), O. Farish (U. K. ), I. Gallimberti (Italy) , A. Garscadden (U. S. A. ), D. R. James (U. S. A. ), E. Marode (France), T. Nitta (Japan), W. Pfeiffer (Germany), Y. Qiu (China), I. Sauers (U. S. A. ), R. J. Van Brunt (U. S. A. ), and W. Zaengl (Switzerland). The local arrangements committee consisted of members of the Health Sciences Research Division and personnel of the Conference Office of the Oak Ridge National Laboratory, and staff of the University of Tennessee (UTK). The contributions of each member of these committees, the work of the Session Chairmen, the interest of the participants, and the advice of innumerable colleagues are gratefully acknowledged. I am especially indebted to Dr. Isidor Sauers, Dr. David R. James, Mrs.

Gaseous Dielectrics VIII covers recent advances and developments in a wide range of basic, applied, and industrial areas of gaseous dielectrics.

This volume is comprehensive in its description of science and the scientist, the role of science in our lives, and the nature of the most important achievements in science. It deconstructs many aspects of scientific culture and its interaction with the larger society in which it is embedded. Written by a working scientist, the volume bridges the gap between the scientific and the nonscientific communities by relating broad social and philosophical issues to science, and by connecting science and its methods to modern human society.

This is a detailed record of the proceedings The Ninth International Symposium on Gaseous Dielectrics held at the Turf Valley Resort and Conference Center, Ellicott City, Maryland, USA, May 21-25, 2001. It covers advances and developments in a wide range of basic, applied, and industrial areas of gaseous dielectrics. The volume deals with fundamental contributions to the basic physics of gaseous dielectric materials and the understanding of basic gas discharge mechanisms and plasmas. It also deals with advances in gas-insulated equipment, especially gas-insulated transmission lines, gas-insulated transformers, and gas-insulated arc and current interrupters and the associated issues of recycling and handling of gas dielectric gases and mixtures. Included in this volume are recent developments in basic discharge and breakdown mechanisms, modeling and simulations of electrical and plasma behavior of dielectric gases, partial discharges and diagnostics, high-pressure gas dielectrics (especially SF6/N2 gas mixtures), gas decomposition, effects of particle contamination on the gas dielectric properties, and recycling of used SF6.

This volume deals with the basic knowledge and understanding of fundamental interactions of low energy electrons with molecules. It pro­ vides an up-to-date and comprehensive account of the fundamental in­ teractions of low-energy electrons with molecules of current interest in modern technology, especially the semiconductor industry. The primary electron-molecule interaction processes of elastic and in­ elastic electron scattering, electron-impact ionization, electron-impact dissociation, and electron attachment are discussed, and state-of-the­ art authoritative data on the cross sections of these processes as well as on rate and transport coefficients are provided. This fundamental knowledge has been obtained by us over the last eight years through a critical review and comprehensive assessment of "all" available data on low-energy electron collisions with plasma processing gases which we conducted at the National Institute of Standards and Technology (NIST). Data from this work were originally published in the Journal of Physical and Chemical Reference Data, and have been updated and expanded here. The fundamental electron-molecule interaction processes are discussed in Chapter 1. The cross sections and rate coefficients most often used to describe these interactions are defined in Chapter 2, where some recent advances in the methods employed for their measurement or calculation are outlined. The methodology we adopted for the critical evaluation, synthesis, and assessment of the existing data is described in Chapter 3. The critically assessed data and recommended or suggested cross sections and rate and transport coefficients for ten plasma etching gases are presented and discussed in Chapters 4, 5, and 6.

This volume deals with the basic knowledge and understanding of fundamental interactions of low energy electrons with molecules. It pro­ vides an up-to-date and comprehensive account of the fundamental in­ teractions of low-energy electrons with molecules of current interest in modern technology, especially the semiconductor industry. The primary electron-molecule interaction processes of elastic and in­ elastic electron scattering, electron-impact ionization, electron-impact dissociation, and electron attachment are discussed, and state-of-the­ art authoritative data on the cross sections of these processes as well as on rate and transport coefficients are provided. This fundamental knowledge has been obtained by us over the last eight years through a critical review and comprehensive assessment of "all" available data on low-energy electron collisions with plasma processing gases which we conducted at the National Institute of Standards and Technology (NIST). Data from this work were originally published in the Journal of Physical and Chemical Reference Data, and have been updated and expanded here. The fundamental electron-molecule interaction processes are discussed in Chapter 1. The cross sections and rate coefficients most often used to describe these interactions are defined in Chapter 2, where some recent advances in the methods employed for their measurement or calculation are outlined. The methodology we adopted for the critical evaluation, synthesis, and assessment of the existing data is described in Chapter 3. The critically assessed data and recommended or suggested cross sections and rate and transport coefficients for ten plasma etching gases are presented and discussed in Chapters 4, 5, and 6.

Gaseous Dielectrics IX covers recent advances and developments in a wide range of basic, applied, and industrial areas of gaseous dielectrics.

The Advanced Study Institute (ASI) on "Linking the Gaseous and Condensed Phases of Matter: The Behavior of Slow Electrons" was held at Patras, Greece, September 5-18, 1993. The organizers of the Patras ASI felt that the study of the electronic properties of matter in various states of aggregation has advanced to a point where further progress required the interfacing of the phases of matter in order to find out and to understand how the microscopic and macroscopic properties of materials and processes change as we go from low pressure gas to the condensed phase. This approach is of foremost significance both from the point of view of basic research and of applications. Linking the electronic properties of the gaseous and condensed phases of matter is a fascinating new frontier of science embracing scientists not only from physics and chemistry but also from the life sciences and engineering. The Patras ASI brought together some of the world's foremost experts who work in the field of electronic properties of molecular gases, clusters, liquids, and solids. The thirty five lectures given at the meeting as well as the twenty nine poster papers presented and the formal and informal discussions that took place focused largely on the behavior of slow electrons in matter.

The Sixth International Symposium on Gaseous Dielectrics was held in Knoxville, Tennessee, U.S.A., on September 23-27, 1990. The symposium continued the trans disciplinary character and comprehensive approach of the preceding five symposia. Gaseous Dielectrics VI is a detailed record of the symposium proceedings. It covers recent advances and developments in a wide range of basic, applied and industrial areas of gaseous dielectrics. It is hoped that Gaseous Dielectrics VI will aid future research and development in and encourage wider industrial use of gaseous dielectrics. The Organizing Committee of the Sixth International Symposium on Gaseous Dielectrics consisted of L. G. Christophorou (U.S.A.), F. Y. Chu (Canada), A. H. Cookson (U.S.A.), D. L. Damsky (U.S.A.), O. Farish (U.K.), I. Gallimberti (Italy), A. Garscadden (U.S.A.), E. Marode (France), T. Nitta (Japan), W. Pfeiffer (Germany), I. Sauers (U.S.A.), R. J. Van Brunt (U.S.A.), and W. Zaengl (Switzerland). The local arrangements committee consisted of members of the Health and Safety Research Division and personnel of the Conference Office of the Oak Ridge National Laboratory, and staff of the University of Tennessee (UTK). The contributions of each member of these committees, the work of the Session Chairmen, the interest of the participants, and the advice of innumerable colleagues are gratefully acknowledged.

Gaseous Dielectrics VIII covers recent advances and developments in a wide range of basic, applied, and industrial areas of gaseous dielectrics.

The Seventh International Symposium on Gaseous Dielectrics was held in Knoxville, Tennessee, U. S. A. , on April 24-28, 1994. The symposium continued the interdisciplinary character and comprehensive approach of the preceding six symposia. Gaseous DielecIries VII is a detailed record of the symposium proceedings. It covers recent advances and developments in a wide range of basic, applied and industrial areas of gaseous dielectrics. It is hoped that Gaseous DielecIries VII will aid future research and development in, and encourage wider industrial use of, gaseous dielectrics. The Organizing Committee of the Seventh International Symposium on Gaseous Dielectrics consisted of G. Addis (U. S. A. ), L. G. Christophorou (U. S. A. ), F. Y. Chu (Canada), A. H. Cookson (U. S. A. ), O. Farish (U. K. ), I. Gallimberti (Italy) , A. Garscadden (U. S. A. ), D. R. James (U. S. A. ), E. Marode (France), T. Nitta (Japan), W. Pfeiffer (Germany), Y. Qiu (China), I. Sauers (U. S. A. ), R. J. Van Brunt (U. S. A. ), and W. Zaengl (Switzerland). The local arrangements committee consisted of members of the Health Sciences Research Division and personnel of the Conference Office of the Oak Ridge National Laboratory, and staff of the University of Tennessee (UTK). The contributions of each member of these committees, the work of the Session Chairmen, the interest of the participants, and the advice of innumerable colleagues are gratefully acknowledged. I am especially indebted to Dr. Isidor Sauers, Dr. David R. James, Mrs.