Microsystems – serie

Explosive growth in the field of microsystem technology (MST) has introduced a variety of promising products in major disciplines from microelectronics to life sciences. Especially the life sciences and health care business was, and is expected to be a major market for MST products. Undoubtedly the merging of biological sciences with micro- and nanoscience will create a scientific and technological revolution in future. Microminiaturization of devices, down to the nanoscale, approaching the size of biological structures, will be a prerequisite for the future success of life sciences. Bioanalytical and therapeutic micro- and nanosystems will be mandatory for system biologists in the long run, to obtain insight into morphology, the function and the interactive processes of the living system. With such a deeper understanding new and personalized drugs could be developed leading to a revolution in life sciences. Today, microanalytical devices are used in clinical analytics or molecular biology as gene chips. In parallel, standard microbiomedical products are employed in the intensive care and surgical theatre, mainly for monitoring and implantation purposes. The gap between these two different scientific fields will be closed, however, as soon as functional micro devices can be produced, allowing a deeper view into the function of cells and whole organisms.Here, a new discipline evolved which focuses on microsystems for living systems called "BIOMEMS". In this review at a glance the exciting field of bio-microsystems, from their beginnings to indicators of future successes are presented. It will also show that a broad penetration of micro and nano technologies into biology and medicine will be mandatory for future scientific and new product development progress in life science.

Dynamics of Microelectromechanical Systems is a systematic overview of the dynamics of MEMS (microelectromechanical systems), microstructures, and their responses. The focus is on the mecahnical/structural micro domain and the compliant nature of mechanical transmission.Features of this work include:An in-depth treatment of problems that involve reliable modeling, analysis and design,Analytical models with correct dependences on service dimensions,Cantilever based systems for nanofabrication researchers and designers, andDynamics of complex spring and beam microsystems.This material contains numerous fully-solved examples as well as many end-of-the-chapter problems. This is a follow up to the book, Mechanics of Microelectromechanical Systems, by Lobontiu and Garcia (Springer 2004), but the material in this new book is self-contained.  An instructor's solution manual is available on the book's webpage at springer.com.Dynamics of Microelectromechanical Systems is a timely text and reference for microstructural engineers, microengineers, and MEMS specialists.

Augmented Materials and Smart Objects investigates the issues required to ensure technology platforms capable of being seamlessly integrated into everyday objects, particularly the requirements for integrated computation and MEMs sensors, System-in-a-package solutions, multi-chip modules, the impact of the trend towards embedded microelectronic electronics sub-systems, novel assembly techniques for autonomous MEMs sensors, as well as practical performance issues that are key to the AmI concept.Also discussed are current requirements for realizing applications-oriented examples of smart objects (e.g. smart textiles, gadgets, integration of smart systems for utility and environmental monitoring, etc); these are based upon heterogeneous systems linking networks of sensors attached to (or physically embedded in) objects with information management systems enabling collections of smart objects to collaborate to provide proactive services to the user.Finally, Augmented Materials and Smart Objects describes and discusses a number of vision statements strongly relevant to the future development of distributed embedded sensor and actuator platforms for smart objects, and ultimately Ambient Intelligence. The framework for this is the concept of Augmented Materials; these are materials with fully embedded distributed information systems, designed to measure all relevant physical properties and provide a full knowledge representation of the material; in effect, the material would "know" itself, and its current status.

This work describes advances in the field of scanning probe lithography (SPL), a high resolution patterning technique that uses a sharp tip in close proximity to a sample to pattern nanometer-scale features on the sample. SPL is capable of patterning sub-30nm features with nanometer-scale alignment registration. It is a relatively simple, inexpensive, reliable method for patterning nanometer-scale features on various substrates. It has potential applications for nanometer-scale research, for maskless semiconductor lithography, and for photomask patterning. The authors of this book have been key players in this exciting new field. Calvin Quate has been involved since the beginning in the early 1980s. Hyongsok Tom Soh and Kathryn Wilder Guarini have been the members of this group whoin have brought about remarkable series of advances in SPM lithography. Some of these advances have been in the control of the tip which has allowed the scanning speed to be increased from m/second to mm/second. Both non-contact and in-contact writing have been demonstrated as has controlled writing of sub-100 nm lines over large steps on the substrate surface.The engineering of a custom-designed MOFSET built into each microcantilever for individual current control is another notable achievement. Micromachined arrays of probes each with individual control have been demonstrated. One of the most intriguing new aspects is the use of directly-grown carbon nanotubes as robust, high-resolution emitters. In this book the authors describe the historical context, the relevant inventions, and the prospects for eventual manufacturing use of this exciting new technology.

This text shows how to design and fabricate optical microsystems using innovative technologies and and original architectures. A barcode scanner, laser projection mirror and a microspectrometer are explained in detail, starting from the system conception, discussing simulations, choice of cleanroom technologies, design, fabrication, device test, packaging all the way to the system assembly. An advanced microscanning device capable of one- and two-dimensional scanning can be integrated in a compact barcode scanning system composed of a laser diode and adapted optics. The original design of the microscanner combines efficiently the miniaturized thermal mechanical actuator and the reflecting mirror, providing a one-dimensional scanning or a unique combination of two movements, depending on the geometry. The simplicity of the device makes it a competitive component. The authors rethink the design of a miniaturized optical device and find a compact solution for a microspectrometer, based on a tunable filter and a single pixel detector. A porous silicon technology combines efficiently the optical filter function with a thermal mechanical actuator on chip.The methodology for design and process calibration are discussed in detail. The device is the core component of an infrared gas spectrometer.

Over the last two decades of the 20th century, technologies for microsystems fabrication have made considerable progress. This has made possible a large variety of new commercial devices ranging, for example, from integrated pressure and acceleration microsensors to active micromirror arrays for image projection. In the near future, there will be a number of new devices, which will be commercialized in many application areas. The field of microsystems is characterized by its wide diversity, which requires a multidisciplinary approach for design and processes as well as in application areas. Although there is a common technological background derived from integrated circuits, it is clear that microsystems will require additional application-specific technologies. Since most microsystem technologies are based on batch processing and dedicated to mass production, prototyping is likely to be an expensive and time-consuming step. It is recognized that standardization of the processes as well as of the design tools will definitely help reduce the entry cost of microsystems. This creates a very challenging situation for the design, modelling and simulation of microsystems.This text gives an overview of the problems associated with modelling and simulation of microsystems. It introduces a new methodology, which is supported by several examples. It should provide a useful starting point for both scientists and engineers seeking background information for efficient design of microsystems.

This volume describes a research collaboration between IBM Almaden and Stanford University in which a new mass data storage technology was evaluated. This technology is based on the use of heated cantilevers to form submicron indentations on a polycarbonate surface, and piezoresistive cantilevers to read those indentations. The book describes how silicon micromachined cantilevers can be used for high-density topographic data storage on a simple substrate such as polycarbonate. The cantilevers can be made to incorporate resistive heaters (for thermal writing) or piezoresistive deflection sensors (for data readback). The primary audience for the text is industrial and academic workers in the microelectromechanical systems (MEMS) area. It should also be of interest to researchers in the data storage industry who are investigating future storage technologies.

This text introduces the principles of scanning probe systems with particular emphasis on techniques for increasing speed. The authors include useful information on the characteristics and limitations of state-of-the-art machines, as well as the properties of the systems that will follow in the future. The basic approach is two-fold. First, fast scanning systems for single probes are treated and, second, systems with multiple probes operating in parallel are presented. The key components of the SPM are the mechanical microcantilever with integrated tip and the systems used to measure its deflection. In essence, the entire apparatus is devoted to moving the tip over a surface with a well-controlled force. The mechanical response of the actuator that governs the force is of the utmost importance since it determines the scanning speed. The mechanical response relates directly to the size of the actuator, smaller is faster. Traditional scanning probe microscopes rely on piezoelectric tubes of centimeter size to move the probe.

This work presents a packaged ultrasound microsystem for object detection and distance metering based on micromachined silicon transducer elements. It describes the characterization, optimization and the long-term stability of silicon membrane resonators as well as appropriate packaging for ultrasound microsystems. It also describes a cost-effective approach to the realization of a micro electro mechanical system (MEMS). The micromachined silicon transducer elements were fabricated using industrial IC technology combined with standard silicon micromachining techniques. Additionally, this approach allows the cointegration of the driving and read-out circuitry. To ensure the industrial applicability of the fabricated transducer elements intensive long-term stability and reliability tests were performed under various environmental conditions such as high temperature and humidity. Great effort was undertaken to investigate the packaging and housing of the ultrasound system, which mainly determine the success or failure of an industrial microsystem. A low-stress mounting of the transducer element minimizes thermomechanical stress influences.The developed housing not only protects the silicon chip but also improves the acoustic performance of the transducer elements. The developed ultrasound proximity sensor system can determine object distances up to 10 cm with an accuracy of better than 0.8 mm. It should be of interest to MEMS researchers as well as those involved in solid-state sensor development.

The drive to replace damaged tissues with "tissue engineered" constructs has led to fundamental questions regarding the importance of cell-cell and cell-substrate interactions in achieving the desired result. Photolithographic techniques coupled with standard silane chemistry can be readily adapted to reproducibly create arrays of cells on glass substrates, allowing control over the cell-cell and cell-substrate interactions of interest. These techniques have applications in bioartificial organs, in particular, and this study focuses on the utility of microfabrication in optimization of a bioartificial liver device.

Advances in the semiconductor technology have enabled steady, exponential im- provement in the performance of integrated circuits. Miniaturization allows the integration of a larger number of transistors with enhanced switching speed. Novel transistor structures and passivation materials diminish circuit delay by minimizing parasitic electrical capacitance. These advances, however, pose several challenges for the thermal engineering of integrated circuits. The low thermal conductivities of passivation layers result in large temperature rises and temperature gradient magni- tudes, which degrade electrical characteristics of transistors and reduce lifetimes of interconnects. As dimensions of transistors and interconnects decrease, the result- ing changes in current density and thermal capacitance make these elements more susceptible to failure during brief electrical overstress. This work develops a set of high-resolution measurement techniques which de- termine temperature fields in transistors and interconnects, as well as the thermal properties of their constituent films.At the heart of these techniques is the thermore- flectance thermometry method, which is based on the temperature dependence of the reflectance of metals. Spatial resolution near 300 nm and temporal resolution near IOns are demonstrated by capturing transient temperature distributions in intercon- nects and silicon-on-insulator (SOl) high-voltage transistors. Analyses of transient temperature data obtained from interconnect structures yield thermal conductivities and volumetric heat capacities of thin films.

Principles and Applications of NanoMEMS Physics presents the first unified exposition of the physical principles at the heart of NanoMEMS-based devices and applications. In particular, after beginning with a comprehensive presentation of the fundamentals and limitations of nanotechnology and MEMS fabrication techniques, the book addresses the physics germane to this dimensional regime, namely, quantum wave-particle phenomena, including, the manifestation of charge discreteness, quantized electrostatic actuation, and the Casimir effect, and quantum wave phenomena, including, quantized electrical conductance, quantum interference, Luttinger liquids, quantum entanglement, superconductivity and cavity quantum electrodynamics. Potential building blocks are also addressed for NanoMEMS applications, including, nanoelectromechanical quantum circuits and systems such as charge detectors, the which-path electron interferometer, and the Casimir oscillator, as well as a number of quantum computing implementation paradigms. Finally, NanoMEMS applications in photonics are addressed, including nanophotonic light sources and plasmonic devices.

This book provides the background, tools, and directions you need to confidently choose fabrication methods and materials for miniaturization problems (materials, processes, designs, characterisations and potential applications).MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world. The development of micro-mechanical systems (MEMS) foreshadows momentous changes not only in the technology world, but in virtually every aspect of human life.

The central idea of this text is microfluidics, a research field which finds its niche in biomedical devices, especially on lab-on-a-chip and related products. Being the essential component in providing driving fluidic flows, an example of micropump is chosen to illustrate a complete cycle in the development of microfluidic devices which includes literature review, designing and modelling, fabrication and testing. A few articles are included to demonstrate the idea of tackling this research problem, and they cover the main development scope discussed earlier as well as other advanced modelling schemes for microfluidics and beyond.

As the field of Microsystems expands into more disciplines and new applications such as RF-MEMS, Optical MEMS and Bio-MEMS, thermal management is becoming a critical issue in the operation of many microdevices, including microelectronic chips. "Heat Convection in Micro Ducts" focuses on the fundamental physics of convective heat transfer in microscale and specific applications such as: microchannel heat sinks, micro heat pipes, microcoolers and micro capillary pumped loops.

Micromachined scanning mirrors are interesting for a wide variety of applications because of their potential low cost, high speed, low power consumption, and reliability. These mirrors can offer significant advantages over macro-scale mirrors, but their fundamental limitations have not been widely discussed. Miniaturization in electronic systems has led to radical improvements in computers and communications, and micromachining technologies promise to generate such improvements in miniaturized mechanical and optical systems, including specifically higher-speed, smaller, lower-cost scanning mirrors. This text provides an overview of the performance enhancements that will be realized by miniaturizing scanning mirrors like those used for laser printers and barcode scanners, and the newly enabled applications, including raster-scanning projection video displays and compact, high-speed fiber-optic components. There are a wide variety of methods used to fabricate micromachined mirrors - each with its advantages and disadvantages. There are, however, performance criteria common to mirrors made from any of these fabrication processes.For example, optical resolution is related to the mirror aperture, the mirror flatness, and the scan angle. This book provides a framework for the design of micromirrors, and derives equations showing the fundamental limits for micromirror performance. These limits provide the micromirror designer tools with which to determine the acceptable mirror geometries, and to quickly and easily determine the range of possible mirror optical resolution and scan speed. The book presents descriptions of mirrors made from two fabrication processes - the surface-micromachining process and the staggered torsional electrostatic combdrive (STEC) high-aspect ratio micromachining process. The mirrors made using these two processes are evaluated for scan speed, optical resolution, ease of manufacture, and reliability. "Micromachined Mirrors" also presents an example application of surface-micromachined mirrors: a raster-scanning projection video display. This demonstration shows the advantages of micromachined mirrors (small high-speed scanners) with special attention paid to the major drawback of surface-micromachined mirrors (lower resolution due to dynamic deformation).The successful demonstration of this simple prototype video display helps clarify the importance of the critical performance characteristics to consider when designing micromachined mirrors.

The multidisciplinary nature of microelectromechanical systems (MEMS) places huge demands on the MEMS designer to have expertise in many areas. Despite the increasing availability of analysis methods and simulation tools for MEMS, the process of conceiving a design or optimizing it is still largely dependent on designer's experience, expertise, and creativity. Synthesis methods, on the other hand, can automatically generate and optimize designs for user-specified requirements saving considerable time. They are capable of new designs that human designers might find it hard to get by manual iteration-based analysis methods. This text is a collection of optimization-based synthesis methods for MEMS. Various chapters written by leading researchers in the field cover a variety of MEMS devices and actuation principles including mechanical, electrostatic, electro-thermal, and piezoelectric. Process, mask, and system-level syntheses are also addressed. Sufficient background material, algorithms, and details of implementation of the optimization procedures are included to facilitate application to practical problems by MEMS engineers and researchers as well as students.This book underscores the importance of synthesis in designing MEMS efficiently and economically.

Explosive growth in the field of microsystem technology (MST) has introduced a variety of promising products in major disciplines from microelectronics to life sciences. Especially the life sciences and health care business was, and is expected to be a major market for MST products. Undoubtedly the merging of biological sciences with micro- and nanoscience will create a scientific and technological revolution in future. Microminiaturization of devices, down to the nanoscale, approaching the size of biological structures, will be a prerequisite for the future success of life sciences. Bioanalytical and therapeutic micro- and nanosystems will be mandatory for system biologists in the long run, to obtain insight into morphology, the function and the interactive processes of the living system. With such a deeper understanding new and personalized drugs could be developed leading to a revolution in life sciences. Today, microanalytical devices are used in clinical analytics or molecular biology as gene chips. In parallel, standard microbiomedical products are employed in the intensive care and surgical theatre, mainly for monitoring and implantation purposes. The gap between these two different scientific fields will be closed, however, as soon as functional micro devices can be produced, allowing a deeper view into the function of cells and whole organisms.Here, a new discipline evolved which focuses on microsystems for living systems called "BIOMEMS". In this review at a glance the exciting field of bio-microsystems, from their beginnings to indicators of future successes are presented. It will also show that a broad penetration of micro and nano technologies into biology and medicine will be mandatory for future scientific and new product development progress in life science.

Dynamics of Microelectromechanical Systems is a systematic overview of the dynamics of MEMS (microelectromechanical systems), microstructures, and their responses. The focus is on the mecahnical/structural micro domain and the compliant nature of mechanical transmission.Features of this work include:An in-depth treatment of problems that involve reliable modeling, analysis and design,Analytical models with correct dependences on service dimensions,Cantilever based systems for nanofabrication researchers and designers, andDynamics of complex spring and beam microsystems.This material contains numerous fully-solved examples as well as many end-of-the-chapter problems. This is a follow up to the book, Mechanics of Microelectromechanical Systems, by Lobontiu and Garcia (Springer 2004), but the material in this new book is self-contained.  An instructor's solution manual is available on the book's webpage at springer.com.Dynamics of Microelectromechanical Systems is a timely text and reference for microstructural engineers, microengineers, and MEMS specialists.

Augmented Materials and Smart Objects investigates the issues required to ensure technology platforms capable of being seamlessly integrated into everyday objects, particularly the requirements for integrated computation and MEMs sensors, System-in-a-package solutions, multi-chip modules, the impact of the trend towards embedded microelectronic electronics sub-systems, novel assembly techniques for autonomous MEMs sensors, as well as practical performance issues that are key to the AmI concept.Also discussed are current requirements for realizing applications-oriented examples of smart objects (e.g. smart textiles, gadgets, integration of smart systems for utility and environmental monitoring, etc); these are based upon heterogeneous systems linking networks of sensors attached to (or physically embedded in) objects with information management systems enabling collections of smart objects to collaborate to provide proactive services to the user.Finally, Augmented Materials and Smart Objects describes and discusses a number of vision statements strongly relevant to the future development of distributed embedded sensor and actuator platforms for smart objects, and ultimately Ambient Intelligence. The framework for this is the concept of Augmented Materials; these are materials with fully embedded distributed information systems, designed to measure all relevant physical properties and provide a full knowledge representation of the material; in effect, the material would "know" itself, and its current status.

Scanning Probe Lithography (SPL) describes recent advances in the field of scanning probe lithography, a high resolution patterning technique that uses a sharp tip in close proximity to a sample to pattern nanometer-scale features on the sample. SPL is capable of patterning sub-30nm features with nanometer-scale alignment registration. It is a relatively simple, inexpensive, reliable method for patterning nanometer-scale features on various substrates. It has potential applications for nanometer-scale research, for maskless semiconductor lithography, and for photomask patterning. The authors of this book have been key players in this exciting new field. Calvin Quate has been involved since the beginning in the early 1980s and leads the research time that is regarded as the foremost group in this field. Hyongsok Tom Soh and Kathryn Wilder Guarini have been the members of this group who, in the last few years, have brought about remarkable series of advances in SPM lithography. Some of these advances have been in the control of the tip which has allowed the scanning speed to be increased from mum/second to mm/second.Both non-contact and in-contact writing have been demonstrated as has controlled writing of sub-100 nm lines over large steps on the substrate surface. The engineering of a custom-designed MOSFET built into each microcantilever for individual current control is another notable achievement. Micromachined arrays of probes each with individual control have been demonstrated. One of the most intriguing new aspects is the use of directly-grown carbon nanotubes as robust, high-resolution emitters. In this book the authors concisely and authoritatively describe the historical context, the relevant inventions, and the prospects for eventual manufacturing use of this exciting new technology.

Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators shows how to design and fabricate optical microsystems using innovative technologies and and original architectures. A barcode scanner, laser projection mirror and a microspectrometer are explained in detail, starting from the system conception, discussing simulations, choice of cleanroom technologies, design, fabrication, device test, packaging all the way to the system assembly.An advanced microscanning device capable of one- and two-dimensional scanning can be integrated in a compact barcode scanning system composed of a laser diode and adapted optics. The original design of the microscanner combines efficiently the miniaturized thermal mechanical actuator and the reflecting mirror, providing a one-dimensional scanning or an unique combination of two movements, depending on the geometry. The simplicity of the device makes it a competitive component.The authors rethink the design of a miniaturized optical device and find a compact solution for a microspectrometer, based on a tunable filter and a single pixel detector. A porous silicon technology combines efficiently the optical filter function with a thermal mechanical actuator on chip. The methodology for design and process calibration are discussed in detail. The device is the core component of an infrared gas spectrometer.

Principles and Applications of NanoMEMS Physics presents the first unified exposition of the physical principles at the heart of NanoMEMS-based devices and applications. In particular, after beginning with a comprehensive presentation of the fundamentals and limitations of nanotechnology and MEMS fabrication techniques, the book addresses the physics germane to this dimensional regime, namely, quantum wave-particle phenomena, including, the manifestation of charge discreteness, quantized electrostatic actuation, and the Casimir effect, and quantum wave phenomena, including, quantized electrical conductance, quantum interference, Luttinger liquids, quantum entanglement, superconductivity and cavity quantum electrodynamics. Potential building blocks are also addressed for NanoMEMS applications, including, nanoelectromechanical quantum circuits and systems such as charge detectors, the which-path electron interferometer, and the Casimir oscillator, as well as a number of quantum computing implementation paradigms. Finally, NanoMEMS applications in photonics are addressed, including nanophotonic light sources and plasmonic devices.

This book provides the background, tools, and directions you need to confidently choose fabrication methods and materials for miniaturization problems (materials, processes, designs, characterisations and potential applications).MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world. The development of micro-mechanical systems (MEMS) foreshadows momentous changes not only in the technology world, but in virtually every aspect of human life.

Microfluidics and BioMEMS Applications central idea is on microfluidics, a relatively new research field which finds its niche in biomedical devices, especially on lab-on-a-chip and related products. Being the essential component in providing driving fluidic flows, an example of micropump is chosen to illustrate a complete cycle in development of microfluidic devices which include literature review, designing and modelling, fabrication and testing. A few articles are included to demonstrate the idea of tackling this research problem, and they cover the main development scope discussed earlier as well as other advanced modelling schemes for microfluidics and beyond.Scientists and students working in the areas of MEMS and microfluidics will benefit from this book, which may serve both communities as both a reference monograph and a textbook for courses in numerical simulation, and design and development of microfluidic devices.

As the field of Microsystems expands into more disciplines and new applications such as RF-MEMS, Optical MEMS and Bio-MEMS, thermal management is becoming a critical issue in the operation of many microdevices, including microelectronic chips. Heat Convection in Micro Ducts focuses on the fundamental physics of convective heat transfer in microscale and specific applications such as: microchannel heat sinks, micro heat pipes, microcoolers and micro capillary pumped loops. This book will be of interest to the professional engineer and graduate student interested in learning about heat removal and temperature control in advanced integrated circuits and microelectromechanical systems.

Micromachined Mirrors provides an overview of the performance enhancements that will be realized by miniaturizing scanning mirrors like those used for laser printers and barcode scanners, and the newly enabled applications, including raster-scanning projection video displays and compact, high-speed fiber-optic components. There are a wide variety of methods used to fabricate micromachined mirrors - each with its advantages and disadvantages. There are, however, performance criteria common to mirrors made from any of these fabrication processes. For example, optical resolution is related to the mirror aperture, the mirror flatness, and the scan angle. Micromachined Mirrors provides a framework for the design of micromirrors, and derives equations showing the fundamental limits for micromirror performance. These limits provide the micromirror designer tools with which to determine the acceptable mirror geometries, and to quickly and easily determine the range of possible mirror optical resolution and scan speed.

This book presents the necessary analytical and computational tools for MEMS designers to model and simulate most known MEMS devices, structures, and phenomena. In also provides analysis and treatment for the most common static and dynamic phenomena in MEMS.

Advanced Mechatronics and MEMS Devicesdescribes state-of-the-art MEMS devices and introduces the latest technology in electrical and mechanical microsystems. The evolution of design in microfabrication, as well as emerging issues in nanomaterials, micromachining, micromanufacturing and microassembly are all discussed at length in this volume. Advanced Mechatronics also provides a reader with knowledge of MEMS sensors array, MEMS multidimensional accelerometer, artificial skin with imbedded tactile components, as well as other topics in MEMS sensors and transducers. The book also presents a number of topics in advanced robotics and an abundance of applications of MEMS in robotics, like reconfigurable modular snake robots, magnetic MEMS robots for drug delivery and flying robots with adjustable wings, to name a few.