This book highlights numerical models as powerful tools for the optimal design of Micro-Electro-Mechanical Systems (MEMS). However, design optimization should also take into account fine-sizing effects on device behavior and therefore be based on distributed-parameter models, such as finite-element models.
Introduction.- MEMS modelling: distributed vs lumped parameter models.- Engineering electrostatics and boundary-value problems.- Engineering magnetostatics and boundary-value problems.- Steady-conduction field and boundary-value problems.